Method of forming a target for deposition of doped dielectric films by sputtering
A system that incorporates teachings of the subject disclosure may include, for example, a method in which a selection is made for a first major constituent, a second major constituent and a minor constituent for forming a desired material. The method can include mixing the first major constituent, the second major constituent and the minor constituent in a single mixing step to provide a mixture of constituents. The method can include drying the mixture of constituents to provide a dried mixture of constituents and calcining the dried mixture of constituents to provide a calcinated mixture of constituents. The method can include processing the calcinated mixture of constituents to provide a powder of constituents. Other embodiments are disclosed.
1. A method, comprising:
selecting a first major constituent, a second major constituent and at least one minor constituent, wherein the first major constituent is Ta 2 O 5 , wherein the second major constituent is one of BaCO 3 or Pb(CH 3 COO) 2 , and wherein the minor constituent is selected from a group consisting of a nanopowder, a gel, an alkoxide or combinations thereof;
forming a mixture of constituents consisting essentially of the first major constituent, the second major constituent and the minor constituent in a single mixing step;
drying the mixture of constituents to provide a dried mixture of constituents;
calcining the dried mixture of constituents to provide a fully reacted mixture of constituents;
pulverizing and separating the reacted mixture of constituents to provide a powder of constituents;
hot-pressing the powder of constituents to form a target; and
performing physical vapor deposition using the target to form a multicomponent dielectric thin film,
wherein the physical vapor deposition is performed at a deposition rate between nine nanometers per minute and eighteen nanometers per minute, and wherein the target has a density of at least 99%.
2. The method of claim 1 , wherein the second major constituent is Pb(CH 3 COO) 2 .
3. The method of claim 1 , wherein the calcining is performed within 100 C of the temperature of solid state reaction of the constituents.
4. The method of claim 1 , wherein the second major constituent is BaCO 3 .
5. The method of claim 1 , wherein the nanopowder is selected from a group consisting essentially of a rare-earth metal oxide nanopowder, a hydroxide nanopowder, a titanate nanopowder, a zirconate nanopowder, a niobate nanopowder or combinations thereof, and wherein the alkoxide is selected from a group consisting essentially of magnesium ethoxide, aluminum isopropoxide, rare-earth alkoxide, hydroxyacetate, hydroxyoxalate, hydroxypropionate and combinations thereof.
6. A method, comprising:
selecting a first major constituent, a second major constituent and at least one minor constituent, wherein the first major constituent is ZrO 2 , wherein the second major constituent is one of BaCO 3 or Pb(CH 3 COO) 2 , and wherein the minor constituent selected from a group consisting of a nanopowder, a gel, an alkoxide or combinations thereof;
forming a mixture of constituents consisting essentially of the first major constituent, the second major constituent and the minor constituent in a single mixing step;
drying the mixture of constituents to provide a dried mixture of constituents;
calcining the dried mixture of constituents to provide a fully reacted mixture of constituents;
pulverizing and separating the reacted mixture of constituents to provide a powder of constituents;
hot-pressing the powder of constituents to form a target; and
performing physical vapor deposition using the target to form a multicomponent dielectric thin film,
wherein the physical vapor deposition is performed at a deposition rate of at least twelve nanometers per minute, and wherein the target has a density of at least 99%.
7. The method of claim 6 , wherein the second major constituent is BaCO 3 .
8. The method of claim 6 , wherein the calcining is performed within 100 C of the temperature of solid state reaction of the constituents.
9. The method of claim 6 , wherein the second major constituent is Pb(CH 3 COO) 2 .
10. The method of claim 6 , wherein the nanopowder is selected from a group consisting essentially of a rare-earth metal oxide nanopowder, a hydroxide nanopowder, a titanate nanopowder, a zirconate nanopowder, a niobate nanopowder or combinations thereof, and wherein the alkoxide is selected from a group consisting essentially of magnesium ethoxide, aluminum isopropoxide, rare-earth alkoxide, hydroxyacetate, hydroxyoxalate, hydroxypropionate and combinations thereof.
11. A method, comprising:
selecting a first major constituent, a second major constituent and at least one minor constituent, wherein the first major constituent is selected from a group consisting of TiO 2 , Ta 2 O 5 , or ZrO 2 , wherein the second major constituent is one of BaCO 3 or Pb(CH 3 COO) 2 , and wherein the minor constituent is selected from a group consisting of a nanopowder, a gel, an alkoxide or combinations thereof;
forming a mixture of constituents consisting essentially of the first major constituent, the second major constituent and the minor constituent in a single mixing step;
drying the mixture of constituents to provide a dried mixture of constituents;
calcining the dried mixture of constituents to provide a fully reacted mixture of constituents; and
pulverizing and separating the reacted mixture of constituents to provide a powder of constituents.
12. The method of claim 11 , wherein the second major constituent is Pb(CH 3 COO) 2 .