OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME
In a first face and a second face of an irregular configuration portion configuring a wire grid structure, surface roughness of the first face farther from an input side of a light (electromagnetic wave) is made rougher than the surface roughness of the second face closer to the input side of the light (electromagnetic wave). With this configuration, according to this embodiment, since a reflection polarization element can be realized, there can be provided an optical device that is excellent in tolerance to heat and light, and contributes to a reduction in the costs.
1 . A optical device, comprising:
an irregular configuration portion with a periodic structure to which an electromagnetic wave is input,
wherein in first and second faces configuring surfaces of the irregular configuration portion,
a surface roughness of the first face farther from an input side of the electromagnetic wave is rougher than the surface roughness of the second face closer to the input side of the electromagnetic wave.
2 . The optical device according to claim 1 ,
wherein when the surface roughness is expressed by a standard deviation in a normal distribution,
a first standard deviation corresponding to the surface roughness of the first face is larger than a second standard deviation corresponding to the surface roughness of the second face.
3 . The optical device according to claim 2 ,
wherein the first standard deviation ranges from 22 nm to 44 nm.
4 . The optical device according to claim 1 ,
wherein the electromagnetic wave includes a first polarized light, and a second polarized light having a polarization direction orthogonal to that of the first polarized light,
wherein the first face absorbs the first polarized light, and
wherein the second face reflects the second polarized light.
5 . The optical device according to claim 1 ,
wherein the electromagnetic wave includes a first polarized light, and a second polarized light having a polarization direction orthogonal to that of the first polarized light, and
wherein a reflectance of the first polarized light on the first face is smaller than the reflectance of the second polarized light on the second face.
6 . The optical device according to claim 5 ,
wherein the reflectance of the first polarized light on the first face is 1% or smaller, and
wherein the reflectance of the second polarized light on the second face is 85% or larger.
7 . The optical device according to claim 1 ,
wherein a period of the irregular configuration portion is smaller than a wavelength of the electromagnetic wave.
8 . The optical device according to claim 1 ,
wherein the optical device is a reflective polarization plate.
9 . An optical device, comprising:
an irregular configuration portion having a periodic structure to which an electromagnetic wave is input; and
an absorption layer that is disposed in a lower layer of the irregular configuration portion, and absorbs the electromagnetic wave.
10 . The optical device according to claim 9 ,
wherein the electromagnetic wave includes a first polarized light, and a second polarized light having a polarization direction orthogonal to that of the first polarized light, and
wherein the first polarized light is absorbed by the absorption layer, and
wherein the second polarized light is reflected on an upper surface configuring the irregular configuration portion.
11 . The optical device according to claim 9 ,
wherein the electromagnetic wave includes a first polarized light, and a second polarized light having a polarization direction orthogonal to that of the first polarized light, and
wherein a reflectance of the first polarized light on the absorption layer is smaller than the reflectance of the second polarized light on the upper surface configuring the irregular configuration portion.
12 . The optical device according to claim 9 ,
wherein the absorption layer is formed of one of a metal oxide film and a metal nitride film.
13 . A method for manufacturing an optical device, comprising the steps of:
(a) preparing a substrate;
(b) forming an irregular configuration portion with a periodic structure on a surface of the substrate; and
(c) forming a metal film reflecting a shape of the irregular configuration portion, on the substrate on which the irregular configuration portion is formed, through a film forming technique having a directivity.
14 . The method for manufacturing an optical device according to claim 13 ,
wherein the step (c) includes a film forming step using a particle beam in which a motion energy of metal particles is located in a thickness direction of the substrate.
15 . The method for manufacturing an optical device according to claim 13 ,
wherein the step (c) includes a step of making the surface roughness of a bottom surface of a concave of the metal film rougher than the surface roughness of an upper surface of a convex of the metal film.