Heat treatable coated article with tungsten-doped zirconium based layer(s) in coating
View Patent ↗In certain example embodiments, a coated article includes a tungsten-doped zirconium based layer before heat treatment (HT). The coated article is heat treated sufficiently to cause the tungsten-doped zirconium oxide and/or nitride based layer to result in a tungsten-doped zirconium oxide based layer that is scratch resistant and/or chemically durable. The doping of the layer with tungsten has been found to improve scratch resistance.
1. A method of making a heat treated coated article, the method comprising:
having a coated article including a coating supported by a glass substrate, the coating comprising a tungsten-doped layer comprising an oxide and/or nitride of zirconium; and
thermally tempering the coated article, including the glass substrate and the tungsten-doped layer comprising an oxide and/or nitride of zirconium, so that after the tempering a layer comprising tungsten-doped zirconium oxide is provided on the glass substrate.
2. The method of claim 1 , wherein there is more zirconium than tungsten in each of (i) the tungsten-doped layer comprising an oxide and/or nitride of zirconium, and (ii) the layer comprising tungsten-doped zirconium oxide.
3. The method of claim 1 , wherein a metal content of the layer comprising tungsten-doped zirconium oxide is from about 2-40% tungsten.
4. The method of claim 1 , wherein a metal content of the layer comprising tungsten-doped zirconium oxide is from about 5-30% tungsten.
5. The method of claim 1 , wherein a metal content of the layer comprising tungsten-doped zirconium oxide is from about 51-99% zirconium.
6. The method of claim 1 , wherein a metal content of the layer comprising tungsten-doped zirconium oxide is from about 70-95% zirconium.
7. The method of claim 1 , wherein the layer comprising tungsten-doped zirconium oxide includes W-doped Zr x O y where y/x is from about 1.2 to 2.5.
8. The method of claim 7 , wherein y/x is from about 1.4 to 2.1.
9. The method of claim 1 , wherein the layer comprising tungsten-doped zirconium oxide further comprises fluorine and/or carbon.
10. The method of claim 1 , wherein prior to said tempering the tungsten-doped layer comprising an oxide and/or nitride of zirconium comprises tungsten-doped zirconium oxide.
11. The method of claim 1 , wherein prior to said tempering the tungsten-doped layer comprising an oxide and/or nitride of zirconium comprises tungsten-doped zirconium oxynitride.
12. The method of claim 1 , wherein prior to said tempering the tungsten-doped layer comprising an oxide and/or nitride of zirconium comprises tungsten-doped zirconium nitride.
13. The method of claim 1 , wherein prior to the tempering, the coating further comprises a layer comprising diamond-like carbon located on the glass substrate over at least the tungsten-doped layer comprising an oxide and/or nitride of zirconium.
14. The method of claim 1 , wherein prior to and/or after the tempering, the coating further comprises a dielectric layer between the glass substrate and the tungsten-doped layer comprising an oxide and/or nitride of zirconium.
15. The method of claim 1 , wherein the layer comprising tungsten-doped zirconium oxide comprises a nanocrystalline cubic lattice structure.
16. The method of claim 1 , wherein the layer comprising tungsten-doped zirconium oxide is an outermost layer of the coating following tempering.
17. The method of claim 1 , wherein the tempered coated article has a visible transmission of at least 50%.
18. A method of making a heat treated coated article, the method comprising:
having a coated article including a coating supported by a glass substrate, the coating comprising a tungsten-doped layer comprising an oxide and/or nitride of zirconium; and
heat treating the coated article, including the glass substrate and the tungsten-doped layer comprising an oxide and/or nitride of zirconium, so that after the heat treating a layer comprising tungsten-doped zirconium oxide is provided on the glass substrate.
19. The method of claim 18 , wherein there is less tungsten than zirconium in at least one of (i) the tungsten-doped layer comprising an oxide and/or nitride of zirconium, and (ii) the layer comprising tungsten-doped zirconium oxide.
20. The method of claim 18 , wherein a metal content of the layer comprising tungsten-doped zirconium oxide is from about 5-30% tungsten.
21. The method of claim 18 , wherein a metal content of the layer comprising tungsten-doped zirconium oxide is from about 70-95% zirconium.
22. The method of claim 18 , wherein the tungsten-doped layer comprising an oxide and/or nitride of zirconium is sputter-deposited by sputtering both a target comprising Zr and a target comprising W.
23. The method of claim 18 , wherein the tungsten-doped layer comprising an oxide and/or nitride of zirconium is sputter-deposited by sputtering both a target comprising Zr and a target comprising tungsten carbide.
24. The method of claim 18 , wherein prior to said heat treating the tungsten-doped layer comprising an oxide and/or nitride of zirconium comprises tungsten-doped zirconium oxynitride.
25. The method of claim 18 , wherein after the heat treating the coating further comprises a dielectric layer between the glass substrate and the tungsten-doped layer comprising zirconium oxide.
26. The method of claim 18 , wherein the layer comprising tungsten-doped zirconium oxide is an outermost layer of the coating following the heat treating.
27. The method of claim 18 , wherein the coated article after the heat treating has a visible transmission of at least 50%.
28. A method of making a heat treated coated article, the method comprising:
having a coated article including a coating supported by a glass substrate, the coating comprising a layer comprising tungsten and/or tungsten carbide that directly contacts a layer comprising an oxide and/or nitride of zirconium; and
thermally tempering the coated article, including the glass substrate and the layer comprising tungsten and/or tungsten carbide and the layer comprising an oxide and/or nitride of zirconium, so that migration occurs between the layers during said tempering and after the tempering a layer comprising tungsten-doped zirconium oxide is provided on the glass substrate.