Semiconductor thin film, thin film transistor, method for manufacturing same, and manufacturing equipment of semiconductor thin film
View Patent ↗A method for manufacturing a semiconductor thin film is provided which can form its crystal grains having a uniform direction of crystal growth and being large in size and a manufacturing equipment using the above method, and a method for manufacturing a thin film transistor. In the above method, by applying an energy beam partially intercepted by a light shielding element, melt and re-crystallization occur with a light-shielded region as a starting point. The irradiation of the beam gives energy to the light-shielded region of the silicon thin film so that melt and re-crystallization occur with the light-shielded region as the starting point and so that a local temperature gradient in the light-shielded region is made to be 1200° C./μm or more. In the manufacturing method, a resolution of an optical system used to apply the energy beam is preferably 4 μm or less.
1. A semiconductor thin film, comprising:
a semiconductor thin film layer configured to receive an energy beam in a light-shielded region and grow a crystal in a pre-defined direction with the light-shielded region as a starting point, wherein a first thickness of the starting point from which the crystal is grown is less than a second thickness of a terminating point of crystal growth.
2. The semiconductor thin film of claim 1 , wherein the light-shielded region is formed by a light-shielding pattern above the semiconductor thin film layer, and a ratio of a pitch of the light-shielding pattern to a light-shielding width of the light-shielding pattern is at least one.
3. The semiconductor thin film of claim 2 , wherein the light-shielding width of the light-shielding pattern is at least 0.3 μm.
4. The semiconductor thin film of claim 1 , wherein the semiconductor thin film layer includes silicon and has a thickness of about 60 μm.
5. The semiconductor thin film of claim 1 , wherein a temperature gradient in the light-shielded region is at least 300° C./μm.
6. The semiconductor thin film of claim 5 , wherein the semiconductor thin film layer is configured to grow the crystal in a first direction of the temperature gradient and at least partially inhibit growth of the crystal in a second direction orthogonal to the temperature gradient.
7. A thin film transistor, comprising:
a gate electrode;
a thin film layer; and
a gate insulating film interposed between the gate electrode and the thin film layer, wherein the gate insulating film is configured to receive an energy beam and generate a light shielded region in the thin film layer, and wherein the thin film layer is configured to grow a crystal in a pre-defined direction, away from or perpendicular to the gate electrode, with the light-shielded region as a starting point.
8. The thin film transistor of claim 7 , wherein a thickness of the starting point from which the crystal is grown is smaller than a thickness of a terminating point of crystal growth.
9. The thin film transistor of claim 7 , wherein the semiconductor thin film layer includes silicon and has a thickness of about 75 μm.
10. The thin film transistor of claim 7 , wherein a local temperature gradient in the light-shielded region is at least 300° C./μm.
11. The thin film transistor of claim 7 , wherein the semiconductor thin film layer is configured to grow the crystal in a direction of a width of the gate electrode.
12. The thin film transistor of claim 7 , wherein the gate electrode has a width of at least 0.3 μm.
13. An apparatus, comprising:
an irradiation device configured to apply an energy beam to a semiconductor thin film to create a temperature gradient in a light-shielded region of at least 300° C./μm, and cause a crystal to grow in a pre-defined direction with the light-shielded region of the semiconductor thin film as a starting point.
14. The apparatus of claim 13 , wherein the irradiation device includes a projection exposure unit configured to apply the energy beam with a single pulse of irradiation and cause an area of the semiconductor thin film to concurrently melt and re-crystallize.
15. The apparatus of claim 13 , wherein the irradiation device includes an optical system with a resolution of 4 μm or less.
16. The apparatus of claim 13 , wherein the irradiation device is configured to apply the energy beam to the light-shielded region with an intensity gradient of at least 220 mJ/cm2/μm.
17. The apparatus of claim 13 , wherein the irradiation device is further configured to cause the crystal to grow in a first direction of the temperature gradient and at least partially inhibit growth of the crystal in a second direction orthogonal to the temperature gradient.
18. The semiconductor thin film of claim 2 , wherein the semiconductor thin film layer is configured to grow the crystal in a direction defined by a width of the light-shielding pattern.
19. The semiconductor thin film of claim 2 , wherein the semiconductor thin film layer is configured to grow the crystal in a direction perpendicular to the width of the light-shielding pattern.
20. The apparatus of claim 13 , wherein a first thickness of the starting point from which the crystal is grown is less than a second thickness of a terminating point of growth of the crystal.