VIBRATING DEVICE AND OSCILLATOR
The vibrating device of the invention includes a base member, a lid member joined the base member to constitute a cavity, and a vibrating strip housed in the cavity. The vibrating strip includes a thick center portion and a thin outer peripheral portion, the center portion includes an exciting electrode exciting vibration, and the outer peripheral portion includes terminal electrode electrically connected to exciting electrode and having a thickness larger than that of the exciting electrode. The base member is provided with a connecting portion on the surface thereof, and the connecting portion is connected to the terminal electrode and holds the vibrating strip in a cantilevered manner. Accordingly, the vibrating strip is supported by a very small bonding surface, and a compact vibrating device subjected to little deterioration in frequency characteristics with respect to the temperature change is realized.
1 . A vibrating device comprising:
a base member;
a lid member bonded to the base member to form a cavity; and
a vibrating strip configured to be housed in the cavity, wherein
the vibrating strip includes a thick center portion and an outer peripheral portion thinner than the center portion,
the center portion includes an exciting electrode configured to excite vibrations,
the outer peripheral portion includes a terminal electrode electrically connected to the exciting electrode and having a thickness larger than that of the exciting electrode,
the base member includes a connecting portion and a line to be electrically connected to the connecting portion on the surface thereof on the side of the cavity, and
the connecting portion is connected to the terminal electrode and is configured to support the vibrating strip in a cantilevered manner.
2 . The vibrating device according to claim 1 , wherein the terminal electrode has a thickness within a range from 2000 angstrom to 4000 angstrom inclusive.
3 . The vibrating device according to claim 1 , wherein the vibrating strip is an AT cut crystal vibrating strip.
4 . The vibrating device according to claim 2 , wherein the vibrating strip is an AT cut crystal vibrating strip.
5 . The vibrating device according to claim 1 , wherein the connecting portion is formed of a metallic bump.
6 . The vibrating device according to claim 2 , wherein the connecting portion is formed of a metallic bump.
7 . The vibrating device according to claim 3 , wherein the connecting portion is formed of a metallic bump.
8 . The vibrating device according to claim 4 , wherein the connecting portion is formed of a metallic bump.
9 . An oscillator comprising:
the vibrating device according to claim 1 , and
a driving circuit configured to supply a drive signal to the vibrating device.