Method of making a magnetic recording head
View Patent ↗A magnetic recording head comprises a write pole including a throat region with a leading edge, a trailing edge opposite the leading edge, and first and second side edges opposite one another. The magnetic recording head further comprises a first side wall gap layer disposed alongside the first side edge of the throat region, and a second side wall gap layer disposed alongside the second side edge of the throat region. Each of the first and second side wall gap layers has a first width at the leading edge of the throat region smaller than a second width at the trailing edge of the throat region.
1. A method of making a magnetic recording head, comprising the steps of:
forming a write pole extending above a field area;
forming shadowing structures on opposite sides of the write pole;
depositing a side wall gap material onto opposing faces of the write pole in at least a throat region, whereby side wall gap layers are formed on the opposing faces of the writer pole; and
forming side shields on opposite sides of the write pole adjacent the side wall gap layers, the side shields extending at least from a leading edge to a trailing edge;
wherein the shadowing structures are configured to shadow a lower portion of the write pole such that the deposited side wall gap layers are thinner adjacent the lower portion and thicker adjacent a region above the lower portion and such that a width of the deposited side wall gap layers monotonically increases from the leading edge of the throat region to the trailing edge of the throat region.
2. The method of claim 1 , wherein forming the write pole comprises forming a damascene trench in a sacrificial layer, plating a pole material into the damascene trench and removing the sacrificial layer.
3. The method of claim 1 , wherein the step of forming the write pole comprises milling the write pole from a layer of write pole material.
4. The method of claim 1 , wherein the shadowing structures comprise a photoresist material.
5. The method of claim 1 , wherein the shadowing structures are separated from the write pole by a region of field area.
6. The method of claim 1 , wherein the step of depositing the side wall gap material comprises a first step of angular deposition to form a first side wall gap layer on a first side of the write pole, and a second step of angular deposition to form a second side wall gap layer on a second side of the write pole.
7. The method of claim 6 , wherein the first and second steps of angular deposition comprise ion beam deposition.
8. The method of claim 6 , wherein the first and second steps of angular deposition are each configured to have an angle whereby the lower region of the write pole is partially shadowed by one of the shadowing structures.
9. The method of claim 1 , wherein the width of the deposited side wall gap layers linearly increases from the leading edge of the throat region to the trailing edge of the throat region.
10. The method of claim 1 , wherein the deposited side wall gap layers have an outer surface opposite from the write pole, the outer surface having a smooth profile form the leading edge to the trailing edge of the threat regionlinearly increases from the leading edge of the throat region to the trailing edge of the throat region.