IP Library Granted Patent US 8,946,894
Granted Patent B2
US 8,946,894 · App. 13/769,729 · Granted Feb 3, 2015

Package for high-power semiconductor devices

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Quick Facts
Patent No.
US 8,946,894
App. No.
13/769,729
Filed
Feb 18, 2013
Granted
Feb 3, 2015
Kind
B2
Examiner
NHU, DAVID
Art Unit
2817
USPC
257/76
Abstract

Methods and apparatuses for forming a package for high-power semiconductor devices are disclosed herein. A package may include a plurality of distinct thermal spreader layers disposed between a die and a metal carrier. Other embodiments are described and claimed.

Claims (19)

1. An apparatus comprising:

a metal carrier;

a first thermal spreader layer coupled with the metal carrier;

a second thermal spreader layer coupled with the first thermal spreader layer by an adhesive, wherein the first and second thermal spreader layers are composed of the same material; and

a die coupled with the second thermal spreader layer.

2. The apparatus of claim 1 , wherein the first and second thermal spreader layers are chemical vapor deposition diamond layers.

3. The apparatus of claim 1 , wherein the die is a gallium nitride die.

4. The apparatus of claim 1 , wherein the first and second thermal spreader layers comprise polycrystalline silicon carbide, aluminum silicon carbide, or aluminum nitride.

5. The apparatus of claim 1 , wherein the metal carrier comprises copper or aluminum.

6. The apparatus of claim 1 , wherein the first spreader layer has a thickness between 25 and 500 microns and the second spreader layer has a thickness between 25 and 500 microns.

7. A system comprising:

a radio frequency (RF) front end configured to transmit or receive radio frequency signals;

a power supply coupled with the RF front end to provide power to the RF front end; and

a gallium nitride (GaN) high electron mobility transistor (HEMT) device in the RF front end to provide power amplification or in the power supply to provide power management, the GaN HEMT including:

a GaN die;

a plurality of thermal spreader layers coupled with the GaN die;

an adhesive layer coupled between individual thermal spreader layers; and

a metal carrier coupled with the plurality of thermal spreader layers.

8. The system of claim 7 , wherein the plurality of thermal spreader layers comprise chemical vapor deposition diamond.