Semiconductor device
A field plate of a semiconductor device is provided with i) an insulating film that is formed on a surface of the semiconductor substrate, and includes a plurality of first regions, one for each of a plurality of FLR layers, that contact the layers and are arranged at intervals in a radial direction, and a plurality of second regions, one for each of the first regions, that are adjacent to the first regions in the radial direction, and ii) a plurality of first conductive films that are formed, one for each of the layers, inside of the insulating film, are arranged at intervals in the radial direction along the layers when a semiconductor substrate is viewed from above, and that are electrically connected to the layers. A thickness of at least a portion of the second regions is thicker than a thickness of the first regions.
1. A semiconductor device comprising:
a semiconductor substrate that has a cell region in which a semiconductor element is formed, and a non-cell region that is provided around the cell region and that includes a first conductive substrate layer, and a plurality of second conductive field limiting ring (FLR) layers that are formed on a surface of the substrate layer, extend in a first direction along a periphery of the cell region and surround the cell region, and are arranged at intervals in a second direction orthogonal to the first direction; and
a field plate that is formed on a surface of the non-cell region, and that further comprises:
an insulating film that includes protruding portions that protrude on a surface of the semiconductor substrate, and includes
a plurality of first regions, one for each of the plurality of FLR layers, that contact the FLR layers and are arranged at intervals in the second direction, and
a plurality of second regions, one for each of the first regions, that are adjacent to the first regions in the second direction,
a plurality of first conductive films that are formed, one for each of the plurality of FLR layers, inside of the insulating film, are arranged at intervals in the second direction along the FLR layers when the semiconductor substrate is viewed from above, and that are electrically connected to the FLR layers, and
a plurality of second insulating films,
wherein a thickness of at least a portion of the second regions is thicker than a thickness of the first regions,
wherein the plurality of second insulating films contact the front surface of the plurality of FLR layers, and
wherein either the plurality of second insulating films or the plurality of first regions include a silicon nitride film that contacts the plurality of FLR layers.
2. The semiconductor device according to claim 1 , wherein the portion of the second regions, which is thicker than the first regions of the insulating film includes a silicon oxide film formed by a LOCOS method.