Method and apparatus for load-locked printing
View Patent ↗The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.
1. A system for depositing an organic material on a substrate, comprising:
a housing comprising at least a print-head chamber and a second chamber;
an opening in at least one side of each of the print-head and second chambers;
means for reversibly sealing said print-head chamber and said second chamber from the rest of said housing;
a print head disposed within the print-head chamber;
a gas bearing disposed within the print-head chamber and configured to floatingly support said substrate in and through at least one of the chambers, said gas bearing comprising a gas-bearing surface comprising a plurality of fluid nozzles, wherein said plurality of fluid nozzles comprise pressure ports and vacuum ports;
a vacuum source in flow communication with at least one of the chambers; and
an inert-gas source in flow communication with at least one of the chambers.
2. The system of claim 1 , wherein a combination of pressure and vacuum at said pressure ports and said vacuum ports, respectively, provides for control over a floating height of the substrate.
3. The system of claim 1 , further comprising at least one transport mechanism configured to move the substrate into and out of the print-head chamber.
4. The system of claim 3 , wherein said transport mechanism comprises at least in part the gas bearing.
5. The system of claim 3 , further comprising a conveyor, wherein said transport mechanism comprises at least in part the conveyer.
6. The system of claim 1 , wherein said vacuum source and said inert-gas source are in flow communication with said gas bearing.
7. The system of claim 6 , wherein said inert-gas source supplies a floatation gas to the gas-bearing surface.
8. The system of claim 7 , wherein said floatation gas comprises a noble gas.
9. The system of claim 7 , wherein said floatation gas comprises nitrogen.
10. The system of claim 7 , further comprising a chamber gas for providing an inert-gas environment within one or more of said chambers.
11. The system of claim 10 , wherein said floatation gas and said chamber gas are the same.
12. The system of claim 10 , wherein said floatation gas and said chamber gas are different.
13. The system of claim 1 , wherein said means for reversibly sealing comprises one or more gates.
14. The system of claim 13 , wherein said means for reversibly sealing further comprises one or more gas curtains.
15. The system of claim 1 , wherein said means for reversibly sealing comprises one or more partitions.
16. The system of claim 15 , wherein said one or more partitions comprise at least one gas curtain acting as a partition.
17. A system for depositing an organic material on a substrate, comprising:
a housing comprising at least a print-head chamber and a second chamber;
an opening in at least one side of each of the print-head and second chambers;
one or more seals for reversibly sealing the openings of the print-head and second chambers;
a print head disposed within the print-head chamber;
a gas bearing disposed within the print-head chamber, said gas bearing comprising a gas-bearing surface comprising a plurality of pressure ports and vacuum ports, wherein said gas bearing is configured to floatingly support said substrate above said gas-bearing surface during printing;
at least one transport mechanism for moving the substrate into and out of the print-head chamber;
a vacuum source in flow communication with at least the print-head chamber; and
an inert-gas source in flow communication with at least the print-head chamber.
18. The system of claim 17 , wherein said gas bearing is configured to floatingly support said substrate at a controlled height above said gas-bearing surface during printing.
19. The system of claim 18 , wherein the gas bearing is configured to floatingly support said substrate at the controlled height via a combination of pressure and vacuum at said pressure ports and said vacuum ports, respectively.
20. The system of claim 17 , wherein said transport mechanism comprises, at least in part, said gas bearing.
21. The system of claim 17 , wherein said transport mechanism comprises a conveyor.
22. The system of claim 17 , wherein said vacuum source and said inert-gas source are in flow communication with said gas bearing.
23. The system of claim 22 , wherein said inert-gas source supplies a noble gas.
24. The system of claim 22 , wherein said inert-gas source supplies nitrogen.
25. The system of claim 17 , wherein said one or more seals comprises one or more gates.
26. The system of claim 17 , wherein said one or more seals comprises one or more gas curtains.
27. The system of claim 17 , wherein said one or more seals comprises one or more partitions.