Magnetoresistive effect element
View Patent ↗A magnetoresistive effect element in one or more embodiments of the present invention is provided with a memory layer with a variable magnetization direction having a magnetic anisotropy in a direction perpendicular to a film surface, a reference layer with an invariable magnetization direction having the magnetic anisotropy in a direction perpendicular to the film surface, and a tunnel barrier layer formed between the memory layer and the reference layer. The tunnel barrier layer has a first portion at the central part in the film surface and a second portion at a peripheral part. The second portion contains at least boron and oxygen.
1. A tunnel junction layer for a magnetoresistive memory element formed between a reference layer and a memory layer of the magnetoresistive memory element, wherein a portion of the tunnel junction layer is doped greater than a remainder of the tunnel junction layer, and the portion of the tunnel junction layer having greater dopant concentration is large enough to increase a breakdown voltage of the tunnel junction layer without impairing a function of the memory layer, wherein the dopant is boron, and is introduced by diffusion of boron from an adjacent film layer into the tunnel junction layer.
2. The tunnel junction layer of claim 1 , wherein the boron diffuses preferentially into a perimeter portion of the tunnel junction layer.
3. The tunnel junction layer of claim 1 , wherein the portion of the tunnel junction layer having greater dopant concentration comprises oxygen.