Three precision resistors of different sheet resistance at same level

1. An integrated circuit, comprising:

a dielectric layer;

a first resistor disposed over said dielectric layer, said first resistor including a first body and first heads, said first body including a bottom thin film layer and being free of a middle thin film layer and a top thin film layer, said first heads including said bottom thin film layer, said middle thin film layer disposed over and making electrical connection to said bottom thin film layer, and said top thin film layer disposed over and making electrical connection to said middle thin film layer;

a second resistor over said dielectric layer, said second resistor including a second body and second heads, said second body and said second heads including said bottom thin film layer, said middle thin film layer and said top thin film layer; and

a third resistor disposed over said dielectric layer, said third resistor including a third body and third heads, said third body including said top thin film layer and being free of said middle thin film layer.

2. The integrated circuit of claim 1 , in which:

said bottom thin film layer includes carbon-doped silicon chromium 2 to 20 nanometers thick;

said middle thin film layer includes titanium nitride 20 to 200 nanometers thick; and

said top thin film layer includes carbon-doped silicon chromium 10 to 100 nanometers thick.

3. The integrated circuit of claim 1 , in which said top thin film layer extends over ends of both said middle thin film layer and said bottom thin film layer at edges of said first heads.

4. The integrated circuit of claim 1 , in which a dielectric sidewall is disposed on said dielectric layer around said first resistor.

5. The integrated circuit of claim 4 , in which a filament of said top thin film layer is laterally separated from said first body by said dielectric sidewall.

6. The integrated circuit of claim 1 , in which lateral surfaces of said middle thin film layer are recessed from corresponding edges of said top thin film layer in said first heads.

7. The integrated circuit of claim 1 , in which said top thin film layer extends over ends of both said middle thin film layer and said bottom thin film layer at edges of said second heads and said second body.

8. The integrated circuit of claim 1 , in which lateral surfaces of said middle thin film layer are recessed from corresponding edges of said top thin film layer in said second heads and said second body.

9. The integrated circuit of claim 1 , in which said third heads include said middle thin film layer and said bottom thin film layer.

10. The integrated circuit of claim 1 , in which said third body is free of said bottom thin film layer, and said third heads are free of said bottom thin film layer and said middle thin film layer.

11. A method of forming an integrated circuit, comprising the steps of:

forming a dielectric layer at an existing top surface of said integrated circuit;

forming a bottom thin film layer over said dielectric layer;

forming a middle thin film layer over said bottom thin film layer, said middle thin film layer making electrical connection to said bottom thin film layer;

removing said middle thin film layer and said bottom thin film layer in an area for a third body of a third resistor and leaving said middle thin film layer and said bottom thin film layer in an area for a first body and areas for first heads of a first resistor, and in an area for a second body and areas for second heads of a second resistor;

forming a top thin film layer over an existing top surface of said integrated circuit, said top thin film layer making electrical connection to said middle thin film layer; and

removing said top thin film layer and said middle thin film layer in said area for said first body, and leaving said top thin film in said areas for said first heads, said area for said second body, said areas for said second heads, said area for said third body and areas for third heads of said third resistor, and leaving said bottom thin film layer in said area for said first body.

12. The method of claim 11 , in which:

said bottom thin film layer includes carbon doped silicon chromium 2 to 20 nanometers thick;

said middle thin film layer includes titanium nitride 20 to 200 nanometers thick; and

said top thin film layer includes carbon doped silicon chromium 10 to 100 nanometers thick.

13. The method of claim 11 , in which said step of removing said top thin film layer and said middle thin film layer is performed using an etch mask which overlaps ends of said areas for said first heads, so that said top thin film layer overlaps said middle thin film layer and said bottom thin film layer at said ends of said first heads.

14. The method of claim 13 , further including the steps of:

forming a sidewall dielectric layer conformally over said middle thin film layer and said bottom thin film layer after said step of removing said middle thin film layer and said bottom thin film layer in an area for a third body of a third resistor and leaving said middle thin film layer and said bottom thin film layer in an area for a first body and areas for first heads of a first resistor, and in an area for a second body and areas for second heads of a second resistor; and

removing said sidewall dielectric layer from horizontal surfaces of said middle thin film layer and said dielectric layer to leave dielectric sidewalls on lateral surfaces of said middle thin film layer and said bottom thin film layer, before said step of forming said top thin film layer.

15. The method of claim 14 , in which said step of removing said top thin film layer and said middle thin film layer leaves a filament of said top thin film layer abutting said dielectric sidewall, said filament being laterally separated from said bottom thin film layer in said first body by said dielectric sidewall.

16. The method of claim 11 , in which said step of removing said top thin film layer and said middle thin film layer includes a wet etch of said middle thin film layer so that lateral surfaces of said middle thin film layer are recessed from corresponding edges of said top thin film layer in said first heads.

17. The method of claim 11 , in which said step of removing said top thin film layer and said middle thin film layer is performed using an etch mask which overlaps said middle thin film layer and said bottom thin film layer around said second heads and said second body, so that said top thin film layer said middle thin film layer and said bottom thin film layer around said second heads and said second body.

18. The method of claim 11 , in which said step of removing said top thin film layer and said middle thin film layer is performed using an etch mask which is recessed from edges of said middle thin film layer and said bottom thin film layer around said second heads and said second body, so that lateral surfaces of said middle thin film layer are recessed from corresponding edges of said top thin film layer in said second heads and said second body.

19. The method of claim 11 , in which said step of removing said middle thin film layer and said bottom thin film layer is performed so that lateral surfaces of said middle thin film layer are slanted inward.

20. The method of claim 11 , in which said step of removing said middle thin film layer and said bottom thin film layer leaves said middle thin film layer and said bottom thin film layer in said areas for said third heads.

21. The method of claim 11 , in which said step of removing said middle thin film layer and said bottom thin film layer leaves said third body free of said bottom thin film layer, and said third heads free of said bottom thin film layer and said middle thin film layer.

22. An integrated circuit, comprising:

a dielectric layer;

a first thin film resistor layer over the dielectric layer, the first thin film resistor layer having a sheet resistance between 200 ohms and 20,000 ohms per square;

a second thin film resistor layer over the first thin film resistor layer, the second thin film resistor layer having a sheet resistance between 20 milliohms per square to 20 ohms per square; and

a third thin film resistor layer over the second thin film resistor layer, the third thin film resistor layer having a sheet resistance between 20 ohms to 2000 ohms per square;

a first resistor including a first body and first heads, said first body including the first thin film resistor layer and being free of the second thin film resistor layer and the third thin film resistor layer, said first heads including said first thin film resistor layer, said second thin film resistor layer, and said third thin film resistor layer;

a second resistor including a second body and second heads, said second body and said second heads including said first thin film resistor layer, said second thin film resistor layer and said third thin film resistor layer;

a third resistor including a third body and third heads, said third body and said third heads including said third thin film resistor layer and being free of said second thin film resistor layer and said first thin film resistor layer; and

interconnect vias connected to the first heads, the second heads, and the third heads.

23. An integrated circuit, comprising:

a dielectric layer;

a first thin film resistor layer over the dielectric layer;

a second thin film resistor layer over the first thin film resistor layer; and

a third thin film resistor layer over the second thin film resistor layer;

a first resistor including a first body and first heads, said first body including the first thin film resistor layer and being free of the second thin film resistor layer and the third thin film resistor layer, said first heads including said first thin film resistor layer, said second thin film resistor layer, and said third thin film resistor layer;

a second resistor including a second body and second heads, said second body and said second heads including said first thin film resistor layer, said second thin film resistor layer and said third thin film resistor layer; and

a third resistor including a third body and third heads, said third body and said third heads including said third thin film resistor layer and being free of the second thin film resistor layer and said first thin film resistor layer.