IP Library Granted Patent US 9,825,197
Granted Patent B2
US 9,825,197 · App. 13/781,920 · Granted Nov 21, 2017

Method of forming a buffer layer in a solar cell, and a solar cell formed by the method

Inventor: Shih-Wei Chen (Kaohsiung, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L31/1828H01L21/02425H01L21/02485H01L21/02551H01L21/02568H01L21/02614H01L31/02966H01L31/0749Y02E10/541Y02E10/543
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Quick Facts
Patent No.
US 9,825,197
App. No.
13/781,920
Granted
Nov 21, 2017
Kind
B2
Abstract

A method of fabricating a buffer layer of a photovoltaic device comprises: providing a substrate having a back contact layer disposed above the substrate and an absorber layer disposed above the back contact layer; depositing a metal layer on the absorber layer; and performing a thermal treatment on the deposited metal layer in an atmosphere comprising sulfur, selenium or oxygen, to form a buffer layer.

Claims (35)

1. A method of fabricating a buffer layer of a photovoltaic device comprising:

providing a substrate having a back contact layer disposed above the substrate and an absorber layer disposed above the back contact layer;

depositing a metal layer comprising cadmium or Zn 1-x Mg x on the absorber layer; and

performing a thermal annealing treatment on the deposited metal layer in an atmosphere comprising sulfur or oxygen gas to transform the deposited metal layer into a buffer layer.

2. The method of claim 1 , wherein the metal layer comprises cadmium, and the atmosphere comprises at least one of the group consisting of sulfur and H 2 S.

3. The method of claim 1 , wherein the atmosphere comprises at least one of the group consisting of sulfur and H 2 S.

4. The method of claim 1 , wherein the metal layer comprises Zn 1-x Mg x , and the atmosphere comprises oxygen.

5. The method of claim 1 , wherein the step of depositing a metal layer on the absorber layer includes depositing from 1 nm to 1000 nm of metal.

6. The method of claim 1 , wherein the step of depositing a metal layer on the absorber layer includes depositing from 5 nm to 500 nm of metal.

7. The method of claim 6 , wherein the buffer layer has a thickness in a range from 13 nm to 1300 nm.

8. The method of claim 1 , wherein the atmosphere further comprises an inert gas.

9. The method of claim 1 , wherein the thermal treatment is a rapid thermal anneal.

10. The method of claim 8 , wherein the thermal treatment is a rapid thermal anneal performed at a temperature from 300° C. to 600° C.

11. A method of fabricating a photovoltaic device comprising:

providing a substrate;

forming a back contact layer above the substrate;

forming a copper indium gallium diselenide (CIGS) absorber layer from a plurality of CIGS precursors above the back contact layer;

sputtering a metal layer on the CIGS absorber layer, the metal layer being an additional indium layer separate from the CIGS precursors ; and

performing a rapid thermal anneal on the deposited metal layer in an atmosphere comprising sulfur, to form a buffer layer; and

forming a front contact layer above the buffer layer.

12. The method of claim 11 , wherein the atmosphere comprises at least one of the group consisting of sulfur and H 2 S.

13. A method of fabricating a photovoltaic device comprising:

providing a substrate;

forming a back contact layer above the substrate;

forming an absorber layer above the back contact layer;

sputtering a metal layer on the absorber layer, the metal layer comprising cadmium; and

performing a thermal annealing treatment on the deposited metal layer in an atmosphere comprising sulfur gas, to form a buffer layer; and

forming a front contact layer above the buffer layer.

14. The method of claim 13 , wherein the atmosphere further comprises an inert gas.

15. The method of claim 1 , wherein the thermal treatment is a rapid thermal anneal.

16. The method of claim 11 , wherein the step of sputtering a metal layer on the absorber layer includes sputtering from 5 nm to 500 nm of metal.

17. The method of claim 11 , wherein the atmosphere further comprises an inert gas.

18. The method of claim 11 , wherein the rapid thermal anneal is performed at a temperature from 300° C. to 600° C.

19. The method of claim 13 , wherein the step of depositing a metal layer on the absorber layer includes depositing from 5 nm to 500 nm of metal.

20. The method of claim 15 , wherein the rapid thermal anneal is performed at a temperature from 300° C. to 600° C.

Assignments (2)
MERGER Recorded Jun 16, 2016
From: TSMC SOLAR LTD.
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 039050/0299 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 1, 2013
From: CHEN, SHIH-WEI
To: TSMC SOLAR LTD.
Reel/Frame 029903/0226 →
Continuity (1)
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