Pattern formation method
View Patent ↗According to the embodiments, a pattern formation method includes a process of formation of a self-assembly material layer containing at least a first segment and a second segment on a substrate having a guide layer, a process of formation of a neutralization coating on the self-assembly material layer, and a process of formation of a self-assembly pattern including a first region containing the first segment and a second region containing the second segment following phase separation of the self-assembly material layer.
1. A pattern formation method, comprising:
forming a guide layer on a substrate;
forming a self-assembly material layer containing at least a first segment and a second segment on the guide layer;
forming a neutralization coating on an upper surface of the self-assembly material layer by exposing the upper surface of the self-assembly material layer to a poor solvent for the self-assembly material layer; and
forming a self-assembled pattern containing a first region comprising the first segment and a second region comprising the second segment after phase separation of the self-assembly material layer.
2. The method of claim 1 , wherein the neutralization coating protects the self-assembly material from air during formation of the self-assembled pattern.
3. The method of claim 1 , wherein the self-assembly material layer is formed from a solution, and a solvent used in the formation of the solution is different than the solvent used to form the neutralization coating.
4. The method of claim 1 , wherein an upper surface of the guide layer has neutral surface for the first segment and the second segment.
5. The method of claim 4 , wherein the self-assembly material layer is formed from a solution, and a solvent used in the formation of the solution is different than the solvent used to form the neutralization coating.
6. The method of claim 1 , wherein the guide layer comprises a plurality of depressions and a plurality of projections.
7. The method of claim 1 , wherein the guide layer comprises a first pattern area and a second pattern area, wherein, in the first pattern area, interfacial tension between the guide layer and the first segment is equal to the interfacial tension between the guide layer and the second segment.
8. The method of claim 7 , wherein, an upper surface of the guide layer has neutral surface for the first segment and the second segment.
9. A pattern formation method, comprising
forming a self-assembly material layer containing at least a first segment and a second segment on a substrate having a guide layer;
forming a neutralization coating on an upper surface of the self-assembly material layer by exposing the upper surface of the self-assembly material layer to a poor solvent for the self-assembly material layer; and
forming a pattern on the self-assembly material layer, the pattern comprising a first region including the first segment and a second region including the second segment when the self-assembly material layer is phase separated.
10. The method of claim 9 , wherein the guide layer comprises a plurality of depressions and a plurality of projections.
11. The method of claim 9 , wherein an upper surface of the guide layer has neutral surface for the first segment and the second segment.
12. The method of claim 7 , wherein in the second pattern area, interfacial tension between the guide layer and the first segment is not equal to the interfacial tension between the guide layer and the second segment.