Method and apparatus for forming a transparent conductive oxide using hydrogen
View Patent ↗A method and apparatus for forming a crystalline cadmium stannate layer of a photovoltaic device by heating an amorphous layer in the presence of hydrogen gas.
1. A method of forming a photovoltaic device comprising:
depositing an amorphous layer containing cadmium and tin over a substrate;
placing the substrate in a multiple-zone oven, which includes a transformation zone and a semiconductor deposition zone, wherein the transformation zone contains hydrogen gas at a concentration of about 0.01% to about 10%;
heat-treating the substrate in the transformation zone to convert the amorphous layer deposited on the substrate into a completely crystalized cadmium stannate layer, wherein the substrate is heat-treated for between about 3 minutes and about 25 minutes; and
after heat-treatment, depositing a buffer layer over the crystalized cadmium stannate layer in the transformation zone; and
depositing a semiconductor material over the buffer layer in the semiconductor deposition zone.
2. The method of claim 1 , wherein the semiconductor material is deposited by a deposition technique selected from the group consisting of vapor transport deposition, close space sublimation, evaporation and sputtering.
3. The method of claim 2 , wherein the semiconductor material is deposited by vapor transport deposition.
4. The method of claim 1 , wherein the hydrogen concentration is about 1%.
5. The method of claim 1 , wherein the substrate is heat-treated at a temperature of less than about 550° C.
6. The method of claim 1 , wherein the substrate is heat-treated for between about 15 minutes and about 20 minutes.
7. The method of claim 1 , wherein the substrate is heat-treated in the presence of a gas mixture comprising hydrogen gas and an inert gas.
8. The method of claim 7 , wherein the inert gas comprises one of the group of argon, nitrogen and helium.
9. The method of claim 8 , wherein the inert gas comprises helium.
10. The method of claim 1 , further comprising diffusing the hydrogen gas into the transformation zone using a diffuser.
11. The method of claim 1 , wherein sputtering is used to deposit the buffer layer.
12. A method of forming a photovoltaic device comprising:
depositing an amorphous layer containing cadmium and tin over a substrate;
for a period of about 3 minutes to about 25 minutes, heat-treating the substrate in a multiple-zone oven, wherein the multiple-zone oven includes a transformation zone and a semiconductor deposition zone, at a temperature between about 500° C. and about 650° C. in the presence of hydrogen gas at a concentration of about 0.01% to about 10% to convert the amorphous layer deposited on the substrate into a completely crystalized cadmium stannate layer in the transformation zone;
depositing a buffer layer over the crystalized cadmium stannate layer in the transformation zone after heat-treatment; and
depositing a semiconductor material over the buffer layer in the semiconductor deposition zone.
13. The method of claim 12 , wherein the substrate is heat-treated in the presence of a gas mixture comprising hydrogen gas and an inert gas.
14. The method of claim 12 , wherein the buffer layer is deposited before the substrate is heat-treated.
15. The method of claim 12 , wherein the buffer layer comprises at least one material selected from the group consisting of tin oxide, zinc tin oxide, zinc oxide, zinc oxysulfide, and zinc magnesium oxide.
16. The method of claim 12 , wherein sputtering is used to deposit the buffer layer.