Manufacturing method and manufacturing apparatus of functional element
View Patent ↗According to one embodiment, the manufacturing method of a functional element includes filling a solvent comprising hydrogen gas and having organic molecules dispersed therein into a gap between the first electrode and the second electrode formed facing the first electrode, and forming an organic layer containing the organic molecules mentioned above between the first electrode and the second electrode.
1. A manufacturing method for a functional element, comprising:
forming a first electrode and a second electrode facing the first electrode;
filling a gap between the first electrode and the second electrode with a solvent including hydrogen gas and organic molecules dispersed therein; and
forming an organic layer containing the organic molecules between the first electrode and the second electrode.
2. The method of claim 1 , wherein the organic layer is a self-assembled mono-molecular layer formed on the surface of the first electrode.
3. The method of claim 2 , wherein the self-assembled mono-molecular layer has a resistance-varying type molecular chain with a reaction group at one end of the molecular chain.
4. The method of claim 3 , wherein the reaction group is a thiol group, and the first electrode contains tungsten.
5. The method of claim 2 , further comprising:
forming an electroconductive layer between the organic layer and the second electrode.
6. The method of claim 5 , wherein the electroconductive layer is a metal oxide layer formed by oxidation of the second electrode.
7. The method of claim 1 , wherein the gap is formed by etching a sacrificial layer formed between the first electrode and the second electrode, the etching provided by an etching liquid doped with hydrogen gas.
8. The method of claim 1 , further comprising:
rinsing the gap between the first electrode and the second electrode with water doped with hydrogen gas.
9. The method of claim 8 , wherein rinsing the gap and forming the organic layer are provided in a reducing atmosphere containing hydrogen gas.
10. A manufacturing method for a functional element, comprising:
forming a first electrode and a second electrode facing the first electrode;
filling a gap between the first electrode and the second electrode with a solvent including hydrogen gas and organic molecules dispersed therein;
rinsing the gap between the first electrode and the second electrode with water doped with hydrogen gas; and
forming an organic layer containing the organic molecules between the first electrode and the second electrode.
11. The method of claim 10 , wherein rinsing the gap and forming the organic layer are provided in a reducing atmosphere containing hydrogen gas.
12. A manufacturing method for a functional element, comprising:
forming a first electrode and a second electrode facing the first electrode;
applying a solvent including hydrogen gas and organic molecules dispersed therein to a surface of the first electrode and the second electrode; and
forming an organic layer containing the organic molecules between the first electrode and the second electrode after applying the solvent, wherein the organic layer contacts the surface of the first electrode without contacting the surface of the second electrode.
13. The method of claim 12 , wherein the solvent is applied to a gap that is formed by etching a sacrificial layer formed between the first electrode and the second electrode, the etching provided by an etching liquid doped with hydrogen gas.
14. The method of claim 13 , further comprising:
rinsing the gap between the first electrode and the second electrode with water doped with hydrogen gas.
15. The method of claim 14 , wherein rinsing the gap and forming the organic layer are provided in a reducing atmosphere containing hydrogen gas.