IP Library Granted Patent US 8,981,448
Granted Patent B2
US 8,981,448 · App. 13/795,872 · Granted Mar 17, 2015

Variable resistance memory device with shunt gate connected to corresponding gate

Inventor: Nam Kyun Park (Gyeonggi-do, KR)
Assignee: SK Hynix Inc.
H01L27/2454H01L21/8239H01L29/7827
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Quick Facts
Patent No.
US 8,981,448
App. No.
13/795,872
Granted
Mar 17, 2015
Kind
B2
Abstract

A variable resistance memory device includes a semiconductor substrate having a vertical transistor with a shunt gate that increases an area of a gate of the vertical transistor.

Claims (14)

1. A variable resistance memory device, comprising:

a semiconductor substrate having a length and a width;

a plurality of vertical transistors, extending from a surface of the semiconductor substrate in a direction perpendicular to the length and the width of the semiconductor substrate, the plurality of vertical transistors being arranged at a fixed interval on the semiconductor substrate;

a variable resistive region formed on each of the plurality of vertical transistors; and

a shunt gate disposed in a space between adjacent vertical transistors and configured to be electrically connected to a gate of each of the plurality of vertical transistors.

2. The variable resistance memory device of claim 1 , wherein each of the plurality of vertical transistors includes:

a pillar extending from the surface of the semiconductor substrate in the direction perpendicular to the length and the width of the semiconductor substrate; and

a surround gate to surround a lower region of the pillar.

3. The variable resistance memory device of claim 2 , wherein the shunt gate is to connect to an adjacent surround gate.

4. The variable resistance memory device of claim 1 , wherein the shunt gate extends from the surface of the semiconductor substrate in the direction perpendicular to the length and the width of the semiconductor substrate, the shunt gate including:

a first portion to contact the adjacent surround gate, and

a second portion, connected to the first portion, wherein the second portion is wider than the first portion in a direction parallel to the surface of the semiconductor substrate.

5. The variable resistance memory device of claim 4 , wherein the second portion extends in a space between the variable resistive regions.

6. The variable resistance memory device of claim 4 , wherein an insulating spacer is interposed between the first portion and the pillar.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 12, 2013
From: PARK, NAM KYUN
To: SK HYNIX INC.
Reel/Frame 029972/0935 →
Priority Claims (1)
KR 10-2012-0146380 · Dec 14, 2012 · national
Continuity (1)
Related Publication 20140166971A1 · Jun 19, 2014