Variable resistance memory device with shunt gate connected to corresponding gate
A variable resistance memory device includes a semiconductor substrate having a vertical transistor with a shunt gate that increases an area of a gate of the vertical transistor.
1. A variable resistance memory device, comprising:
a semiconductor substrate having a length and a width;
a plurality of vertical transistors, extending from a surface of the semiconductor substrate in a direction perpendicular to the length and the width of the semiconductor substrate, the plurality of vertical transistors being arranged at a fixed interval on the semiconductor substrate;
a variable resistive region formed on each of the plurality of vertical transistors; and
a shunt gate disposed in a space between adjacent vertical transistors and configured to be electrically connected to a gate of each of the plurality of vertical transistors.
2. The variable resistance memory device of claim 1 , wherein each of the plurality of vertical transistors includes:
a pillar extending from the surface of the semiconductor substrate in the direction perpendicular to the length and the width of the semiconductor substrate; and
a surround gate to surround a lower region of the pillar.
3. The variable resistance memory device of claim 2 , wherein the shunt gate is to connect to an adjacent surround gate.
4. The variable resistance memory device of claim 1 , wherein the shunt gate extends from the surface of the semiconductor substrate in the direction perpendicular to the length and the width of the semiconductor substrate, the shunt gate including:
a first portion to contact the adjacent surround gate, and
a second portion, connected to the first portion, wherein the second portion is wider than the first portion in a direction parallel to the surface of the semiconductor substrate.
5. The variable resistance memory device of claim 4 , wherein the second portion extends in a space between the variable resistive regions.
6. The variable resistance memory device of claim 4 , wherein an insulating spacer is interposed between the first portion and the pillar.