Capacitor array and signal processor including the array
View Patent ↗A capacitor array includes a plurality of comb capacitors sharing a common comb electrode. At least one of the comb capacitors has a comb electrode as a single base part. Each of the other ones of the comb capacitors has an electrode formed by coupling a plurality of base parts. In the other ones of the comb capacitors, a space between a wire coupling the base parts and an end of each of comb teeth of the common electrode, which is interposed between the base parts, is larger than a space between a base of each of the base parts of the plurality of comb capacitors and an end of each of the comb teeth of the common electrode, which is interposed between comb teeth of the base part.
1. A capacitor array comprising:
a plurality of comb capacitors sharing a common comb electrode, and
a comb shield electrode, wherein
at least one of the comb capacitors has a comb electrode as a single base part,
each of the other ones of the comb capacitors has an electrode formed by coupling a plurality of base parts, and
in the other ones of the comb capacitors, a space between a wire coupling the base parts and an end of each of comb teeth of the common electrode, which is interposed between the base parts, is larger than a space between a base of each of the base parts of the plurality of comb capacitors and an end of each of the comb teeth of the common electrode, which is interposed between comb teeth of the base part,
comb teeth of the shield electrode overlap comb teeth of the base parts of the plurality of comb capacitors as viewed from above, and
the shield electrode includes a plurality of shield electrodes provided above and below the plurality of comb capacitors.
2. A capacitor array comprising:
a plurality of comb capacitors sharing a common comb electrode, wherein
at least one of the comb capacitors has a comb electrode as a single base part,
each of the other ones of the comb capacitors has an electrode formed by coupling a plurality of base parts, and
in the other ones of the comb capacitors, a space between a wire coupling the base parts and an end of each of comb teeth of the common electrode, which is interposed between the base parts, is larger than a space between a base of each of the base parts of the plurality of comb capacitors and an end of each of the comb teeth of the common electrode, which is interposed between comb teeth of the base part,
the plurality of comb capacitors are stacked one on another, and
the comb teeth of the common electrode and the comb teeth of the base parts of the plurality of comb capacitors are arranged in a houndstooth check as viewed in cross-section.
3. A capacitor array comprising:
a plurality of comb capacitors sharing a common comb electrode, wherein
at least one of the comb capacitors has a comb electrode as a single base part,
each of the other ones of the comb capacitors has an electrode formed by coupling a plurality of base parts, and
in the other ones of the comb capacitors, a space between a wire coupling the base parts and an end of each of comb teeth of the common electrode, which is interposed between the base parts, is larger than a space between a base of ach of the base parts of the plurality of comb capacitors and an end of each of the comb teeth of the common electrode, which is interposed between comb teeth of the base part, and
another comb capacitor having a different form from the plurality of comb capacitors is stacked in a layer different from a layer provided with the plurality of comb capacitors.