Solid-state imaging device, members for the same, and imaging system
The present invention provides a solid-state imaging device including a pad capable of reducing inferior connection with an external terminal. The solid-state imaging device includes a first substrate provided, on its front face, with photoelectric conversion elements, a first wiring structure, a second substrate provided, on its front face, with at least a part of peripheral circuits, and a second wiring structure. The first substrate, the first wiring structure, the second wiring structure, and the second substrate are provided in this order. The first wiring structure includes a wiring layer including wirings made mainly of copper. The second wiring structure includes a wiring layer including wirings made mainly of copper. Wirings made mainly of copper in the first wiring structure are bonded with wirings made mainly of copper in the second wiring structure. The solid-state imaging device includes a pad formed of a conductive element made mainly of aluminum.
1. A solid-state imaging device comprising:
a first substrate provided with photoelectric conversion elements;
a first wiring layer including wirings made mainly of copper;
a second substrate provided with at least a part of peripheral circuits; and
a second wiring layer including wirings made mainly of copper,
wherein the first substrate, the first wiring layer, the second wiring layer, and the second substrate are provided in this order,
wherein a wiring made mainly of copper in the first wiring layer is bonded with a wiring made mainly of copper in the second wiring layer, and
wherein the solid-state imaging device includes a pad for outputting a signal based on electric charges of the photoelectric conversion elements, the pad being formed of a conductive element made mainly of aluminum, and
wherein the pad is provided in the same layer as a wiring layer disposed between the first substrate and the second substrate.
2. The solid-state imaging device according to claim 1 , wherein the second substrate is provided with an amplifier transistor for outputting a signal generated based on electric charges of the photoelectric conversion elements, and a reset transistor for resetting the electric charges of the photoelectric conversion elements.
3. An imaging system comprising:
a solid-state imaging device according to claim 1 ; and
a signal processing circuit configured to process a signal output from the solid-state imaging device.
4. The solid-state imaging device according to claim 1 , wherein the peripheral circuits include read-out circuits and control circuits for reading a signal generated based on electric charges of the photoelectric conversion elements.
5. The solid-state imaging device according to claim 1 , wherein the first substrate is provided with a transistor.
6. The solid-state imaging device according to claim 5 , wherein the second substrate is provided with a circuit for supplying a signal to the transistor.
7. The solid-state imaging device according to claim 1 , further comprising a wiring layer which is disposed closer to the first substrate than the first wiring layer is.
8. The solid-state imaging device according to claim 1 , further comprising a wiring layer which is disposed closer to the second substrate than the second wiring layer is.
9. The solid-state imaging device according to claim 1 , wherein there are more wiring layers between the first wiring layer and the second substrate than between the second wiring layer and the first substrate.
10. The solid-state imaging device according to claim 1 , wherein the pad is provided in the other layer than at least one of the first wiring layer and the second layer.
11. The solid-state imaging device according to claim 1 , wherein a plug coupled with the wiring in the first wiring layer is positioned on the first substrate's side of the first wiring layer, and a plug coupled with the wiring in the second wiring layer is positioned on the second substrate's side of the second wiring layer.
12. The solid-state imaging device according to claim 1 , wherein each of the first wiring layer and the second wiring layer has a damascene structure.
13. The solid-state imaging device according to claim 12 , wherein a first insulating film in which wirings of the first wiring layer are embedded is in contact with a second insulating film in which wirings of the second wiring layer are embedded.
14. The solid-state imaging device according to claim 1 , wherein a thickness of the first substrate is smaller than a thickness of the second substrate.
15. The solid-state imaging device according to claim 1 , wherein the first substrate has an opening over the pad.
16. A solid-state imaging device comprising:
a first substrate provided with photoelectric conversion elements;
a first wiring structure provided on the first substrate;
a second substrate provided with at least a part of peripheral circuits; and
a second wiring structure provided the second substrate,
wherein the first substrate, the first wiring structure, the second wiring structure, and the second substrate are provided in this order,
wherein the first wiring structure includes a wiring layer including wirings made mainly of copper,
wherein the second wiring structure includes a wiring layer including wirings made mainly of copper,
wherein wirings made mainly of copper in the wiring layer in the first wiring structure are bonded with wirings made mainly of copper in the wiring layer in the second wiring structure,
wherein the solid-state imaging device includes a pad for outputting a signal based on electric charges of the photoelectric conversion elements, the pad being formed of a conductive element made mainly of aluminum,
wherein the first wiring structure further includes a wiring layer including wirings made mainly of aluminum, and
wherein the pad is provided in the same layer as the wiring layer including wirings made mainly of aluminum.
17. The solid-state imaging device according to claim 16 , wherein the wiring layer including wirings made mainly of aluminum is disposed closer to the front face of the first substrate than any other layers in the first wiring structure.
18. The solid-state imaging device according to claim 16 , wherein the peripheral circuits include read-out circuits and control circuits for reading a signal generated based on electric charges of the photoelectric conversion elements.
19. A solid-state imaging device comprising:
a first substrate provided with photoelectric conversion elements;
a first wiring structure provided on the first substrate;
a second substrate provided with at least a part of peripheral circuits; and
a second wiring structure provided the second substrate,
wherein the first substrate, the first wiring structure, the second wiring structure, and the second substrate are provided in this order,
wherein the first wiring structure includes a wiring layer including wirings made mainly of copper,
wherein the second wiring structure includes a wiring layer including wirings made mainly of copper,
wherein wirings made mainly of copper in the wiring layer in the first wiring structure are bonded with wirings made mainly of copper in the wiring layer in the second wiring structure, wherein the solid-state imaging device includes a pad for outputting a signal based on electric charges of the photoelectric conversion elements, the pad being-formed of a conductive element made mainly of aluminum,
wherein the second wiring structure further includes a wiring layer including wirings made mainly of aluminum, and
wherein the pad is provided in the same layer as the wiring layer including wirings made mainly of aluminum.
20. The solid-state imaging device according to claim 19 , wherein the peripheral circuits includes read-out circuits and control circuits for reading a signal generated based on electric charges of the photoelectric conversion elements.