Semiconductor device and method for fabricating semiconductor buried layer
View Patent ↗The present disclosure provides a semiconductor device and a method for fabricating a semiconductor buried layer. The method includes: preparing a substrate which includes a first oxide layer; forming a first buried layer region in the surface of the substrate by using a photoresist layer with a first buried layer region pattern as a mask, in which a doping state of the first buried layer region is different from a doping state of other region of the substrate; forming a second oxide layer on the surface of the substrate and the first buried layer region; and forming a second buried layer region in the surface of the substrate through self alignment process by using the second oxide layer as a mask. The method disclosed by the present disclosure reduces the complexity of the buried layer procedures and the cost thereof, as well as the probability of crystal defects.
1. A method for fabricating a semiconductor buried layer, comprising:
providing a substrate which includes a first oxide layer formed thereon;
forming a first buried layer region in a surface of the substrate by using process including:
forming a photoresist layer on the first oxide layer, the photoresist having a first buried layer region pattern that exposes a portion of the first oxide layer;
by doping using the photoresist layer as a mask, forming the first buried layer region covered by the exposed portion of the first oxide layer, wherein a doping state of the first buried layer region is different from a doping state of other region of the substrate; and
removing the photoresist layer;
forming a second oxide layer on the surface of the substrate and the first buried layer region, the second oxide layer having a first region covering the first buried layer region and a second region covering a portion of the substrate different from the first buried layer region, a thickness of the first region being greater than a thickness of the second region; and
forming a second buried layer region in the surface of the substrate and covered by the second region of the second oxide layer, through a self alignment process by doping using the second oxide layer as the mask.
2. The method for fabricating a semiconductor buried layer according to claim 1 , wherein the doping state includes doping concentration and impurity type.
3. The method for fabricating a semiconductor buried layer according to claim 1 , further comprising:
removing the first oxide layer and the second oxide layer after forming the second buried layer region, to expose a top surface of both of the first buried layer region and the second buried layer region.
4. The method for fabricating a semiconductor buried layer according to claim 1 , wherein process conditions for forming the first buried layer region include: antimony as an implanted ion, an implanting energy of 40 keV, a doping dosage of 1E15 cm −3 , and a doping concentration of 5E16 cm −3 .
5. The method for fabricating a semiconductor buried layer according to claim 4 , wherein the second oxide layer is formed by wet oxidation process, an oxidation rate of the first region of the second oxide layer being different from an oxidation rate of the second region of the second oxide layer.
6. The method for fabricating a semiconductor buried layer according to claim 5 , wherein the second oxide layer is formed at a temperature of about 815° C.
7. The method for fabricating a semiconductor buried layer according to claim 1 , wherein the thickness of the first region is about 2500 Å, and the thickness of the second region is about 600 Å.
8. A semiconductor device, comprising:
a substrate;
a first buried layer region located in the surface of the substrate, wherein the first buried layer region is formed by using a process including:
forming a first oxide layer on the substrate;
forming a photoresist layer on the first oxide layer, the photoresist having a first buried layer region pattern that exposes a portion of the first oxide layer;
by doping using the photoresist layer as a mask, forming the first buried layer region covered by the exposed portion of the first oxide layer, wherein a doping state of the first buried layer region is different from a doping state of other region of the substrate; and
removing the photoresist layer; and
a second buried layer region located in the surface of the substrate, wherein the second buried layer region is formed through a self alignment process by using a second oxide layer located on the first buried layer region as the mask, and the self alignment process includes:
forming the second oxide layer on the surface of the substrate and the first buried layer region, the second oxide layer having a first region covering the first buried layer region and a second region covering a portion of the substrate different from the first buried layer region, a thickness of the first region being greater than a thickness of the second region; and
forming the second buried layer region in the surface of the substrate and covered by the second region of the second oxide layer, by doping using the second oxide layer as the mask.
9. The method for fabricating a semiconductor buried layer according to claim 3 , wherein the thickness of the first region is about 2500 Å, and the thickness of the second region is about 600 Å.
10. The method for fabricating a semiconductor buried layer according to claim 4 , wherein the thickness of the first region is about 2500 Å, and the thickness of the second region is about 600 Å.
11. The method for fabricating a semiconductor buried layer according to claim 6 , wherein the thickness of the first region is about 2500 Å, and the thickness of the second region is about 600 Å.
12. The method for fabricating a semiconductor buried layer according to claim 6 , wherein the thickness of the first region is about 2500 Å, and the thickness of the second region is about 600 Å.
13. The method for fabricating a semiconductor buried layer according to claim 1 , wherein during the forming of the second buried layer region, doped impurity ions pass through the first region of the second oxide layer and substantially do not pass through the first region of the second oxide layer.
14. The method for fabricating a semiconductor buried layer according to claim 1 , wherein the second buried layer region is located outside the first buried layer region and contacts the first buried layer region.
15. The method for fabricating a semiconductor buried layer according to claim 3 , wherein after removing the first oxide layer and the second oxide layer, the top surface of the first buried layer region and the top surface of the second buried layer region have a step of about 1000 Åtherebetween.
16. The method for fabricating a semiconductor buried layer according to claim 4 , wherein the second buried layer region has a doping type of P-type, and has doped ions of boron or another trivalent element.