Optoelectronic component
View Patent ↗An optoelectronic component has a semiconductor body including an epitaxial layer sequence, and a carrier substrate consisting of a semiconductor material connected to the semiconductor body by a solder layer, and through-connections. The carrier substrate includes a surface doping zone extending along a first main surface facing the semiconductor body. The surface doping zone includes a p-conductive region and an n-conductive region adjacent thereto, between which regions a pn-junction is formed. The n-conductive region electrically connects to a p-doped region of the epitaxial layer sequence via a first sub-region of the solder layer, and the p-conductive region electrically connects to an n-doped region of the epitaxial layer sequence via a second sub-region of the solder layer.
1. An optoelectronic component having a semiconductor body comprising an epitaxial layer sequence having an active layer that generates radiation, and a carrier substrate consisting of a semiconductor material connected to the semiconductor body by a solder layer,
wherein
the carrier substrate comprises a first through-connection and a second through-connection each of which extend from a first main surface of the carrier substrate facing the semiconductor body to a second main surface of the carrier substrate facing away from the semiconductor body,
the epitaxial layer sequence comprises a p-doped semiconductor region and an n-doped semiconductor region, wherein the first through-connection connects in an electrically conductive manner to the p-doped semiconductor region via a first sub-region of the solder layer, and the second through-connection connects in an electrically conductive manner to the n-doped semiconductor region via a second sub-region of the solder layer,
the carrier substrate comprises a surface doping zone which extends along the first main surface,
the surface doping zone comprises a p-conductive region which contains a p-dopant,
the surface doping zone comprises an n-conductive region adjacent to the p-conductive region and contains an n-dopant and a p-dopant so that a pn-junction is formed between the p-conductive region and the n-conductive region,
the n-conductive region electrically connects to the first sub-region of the solder layer and the p-conductive region electrically connects to the second sub-region of the solder layer so that the pn-junction in the surface doping zone forms a protective diode for the semiconductor body,
the p-conductive region contains a p + -conductive region having a higher concentration of p-dopant than a remaining p-conductive region, and
the p + -conductive region is disposed as a ring around the first through-connection.
2. The optoelectronic component according to claim 1 , wherein the surface doping zone extends along the entire first main surface of the carrier substrate with the exception of the through-connections.
3. The optoelectronic component according to claim 1 , wherein the n-conductive region has a width of 5 μm to 20 μm.
4. The optoelectronic component according to claim 1 , wherein the n-conductive region is disposed as a ring around the first through-connection.
5. The optoelectronic component according to claim 1 , wherein the second sub-region of the solder layer connects in the p + -conductive region to the p-conductive region.
6. The optoelectronic component according to claim 1 , wherein the annular n-conductive region and the annular p + -conductive region have part of the p-conductive region disposed therebetween.
7. An optoelectronic component having a semiconductor body comprising an epitaxial layer sequence having an active layer that generates radiation, and a carrier substrate consisting of a semiconductor material connected to the semiconductor body by a solder layer,
wherein,
the carrier substrate comprises a first through-connection and a second through-connection each of which extend from a first main surface of the carrier substrate facing the semiconductor body to a second main surface of the carrier substrate facing away from the semiconductor body,
the epitaxial layer sequence comprises a p-doped semiconductor region and an n-doped semiconductor region, wherein the first through-connection connects in an electrically conductive manner to the p-doped semiconductor region via a first sub-region of the solder layer, and the second through-connection connects in an electrically conductive manner to the n-doped semiconductor region via a second sub-region of the solder layer,
the carrier substrate comprises a surface doping zone extending along the first main surface,
the surface doping zone comprises a p-conductive region which contains a p-dopant,
the surface doping zone comprises an n-conductive region adjacent to the p-conductive region and contains an n-dopant and a p-dopant so that a pn-junction is formed between the p-conductive region and the n-conductive region,
the n-conductive region is disposed as a ring around the first through-connection,
the n-conductive region electrically connects to the first sub-region of the solder layer and the p-conductive region electrically connects to the second sub-region of the solder layer so that the pn-j unction in the surface doping zone forms a protective diode for the semiconductor body.
8. The optoelectronic component according to claim 7 , wherein the carrier substrate is a silicon substrate or a germanium substrate.
9. The optoelectronic component according to claim 7 , wherein the carrier substrate has a thickness of 100 μm to 150 μm.
10. The optoelectronic component according to claim 7 , wherein the surface doping zone has a depth of 0.5 μm to 4 μm.
11. The optoelectronic component according to claim 7 , wherein the surface doping zone has a concentration of free charge carriers of more than 10 18 cm −3 .
12. The optoelectronic component according to claim 7 , wherein outside the surface doping zone, the carrier substrate has a concentration of free charge carriers of less than 10 16 cm −3 .
13. The optoelectronic component according to claim 7 , wherein outside the surface doping zone, the carrier substrate has a specific resistance of more than 200 Ωcm.
14. The optoelectronic component according to claim 7 , wherein the carrier substrate comprises uncoated lateral flanks.
15. The optoelectronic component according to claim 7 , wherein the p-conductive region contains a p + -conductive region having a higher concentration of p-dopant than the remaining p-conductive region.
16. The optoelectronic component according to claim 15 , wherein the second sub-region of the solder layer connects in the p + -conductive region to the p-conductive region.
17. The optoelectronic component according to claim 15 , wherein the p + -conductive region is disposed as a ring around the first through-connection.
18. The optoelectronic component according to claim 17 , wherein the annular n-conductive region and the annular p + -conductive region have part of the p-conductive region disposed therebetween.
19. The optoelectronic component according to claim 7 , wherein the surface doping zone extends along the entire first main surface of the carrier substrate with the exception of the through-connections.
20. The optoelectronic component according to claim 7 , wherein the n-conductive region has a width of 5 μm to 20 μm.