Thermal flow meter
View Patent ↗An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
1. A thermal flow meter comprising:
a subsidiary passage having an opening portion through which a fluid to be measured is to be drawn in; and
a sensor element disposed in the subsidiary passage, the sensor element for measuring a flow rate of the fluid to be measured;
wherein the sensor element includes:
a semiconductor substrate;
a cavity portion formed in the semiconductor substrate;
a heating resistor formed on the cavity portion via an electrically insulating film;
a heating temperature sensor for detecting heating temperature of the heating resistor; and
a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor; and
wherein the heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of the heating resistor in a direction of flow of the fluid to be measured relative to the heating resistor and disposed on upper and lower sides of the heating resistor in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
2. The thermal flow meter according to claim 1 , wherein
the heating temperature sensors disposed upstream and downstream in the direction of flow of the fluid to be measured relative to the heating resistor are formed of a pattern of a plurality of resistors having a turnaround configuration; and
the pattern of the plurality of resistors are electrically connected in series on the electrically insulating film on the cavity portion.
3. The thermal flow meter according to claim 2 , wherein
the pattern of resistors of the heating temperature sensor has a number of resistors disposed upstream and downstream in the direction of flow of the fluid to be measured relative to the heating resistor more than a number of resistors disposed on the upper and lower sides of the heating resistor.
4. The thermal flow meter according to claim 1 , wherein
the heating resistor has a wire for leading an electrode of the heating resistor from the upper side or the lower side of the heating resistor to an outside of the cavity portion; and
the wire has a wire width narrower than a width in a short side direction of the heating resistor at a portion connected to the heating resistor and wider at an end portion of the cavity portion than the wire width at the portion connected to the heating resistor.
5. The thermal flow meter according to claim 4 , wherein
the heating temperature sensor disposed on the lower side of the heating resistor is disposed so as to be sandwiched between the heating resistor and the wire.
6. A thermal flow meter comprising:
a subsidiary passage having an opening portion through which a fluid to be measured is to be drawn in; and
a sensor element disposed in the subsidiary passage, the sensor element for measuring a flow rate of the fluid to be measured,
wherein the sensor element includes:
a semiconductor substrate;
a cavity portion formed in the semiconductor substrate;
a heating resistor formed on the cavity portion via an electrically insulating film;
a heating temperature sensor for detecting heating temperature of the heating resistor;
a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor; and
a wiring portion connected electrically to the heating resistor;
wherein the heating resistor and the wiring portion have a connecting portion for connecting therebetween, the connecting portion including a throttle portion; and
wherein the heating temperature sensor is disposed along the throttle portion so as to surround a periphery of the heating resistor.
7. The thermal flow meter according to claim 6 , wherein
the throttle portion comprises a recess formed by the heating resistor and the wiring portion; and
the heating temperature sensor is disposed along the recess.
8. The thermal flow meter according to claim 1 , wherein
a first temperature-sensitive resistor and a second temperature-sensitive resistor are disposed upstream in the direction of flow of the fluid to be measured relative to the heating resistor and a third temperature-sensitive resistor and a fourth temperature-sensitive resistor are disposed downstream in the direction of flow of the fluid to be measured relative to the heating resistor; and
the flow rate of the fluid to be measured is measured based on a change in resistance variable according to a difference in temperature of the first to fourth temperature-sensitive resistors.
9. The thermal flow meter according to claim 1 , wherein
an electrically insulating film is formed on an upper surface of the heating resistor and the heating temperature sensor is formed on a front surface of the electrically insulating film.
10. The thermal flow meter according to claim 1 , further comprising:
a wiring portion for leading electrically from the heating temperature sensor to an outside of the cavity portion, wherein
the wiring portion has a wire width on the cavity portion wider than a wire width of the heating temperature sensor.
11. The thermal flow meter according to claim 1 , wherein
the heating resistor is formed into a pattern having a plurality of turnaround portions; and
the heating temperature sensor is disposed along the turnaround portions of the heating resistor.
12. The thermal flow meter according to claim 1 , wherein
the subsidiary passage includes: a throttle portion disposed near the opening portion, the throttle portion having a gradually narrowing passage area; a linear portion disposed near a position at which the sensor element is disposed, the linear portion having a straight pathway; and a curved portion disposed between the throttle portion and the linear portion, the curved portion having a curved pathway.
13. The thermal flow meter according to claim 6 , wherein
a first temperature-sensitive resistor and a second temperature-sensitive resistor are disposed upstream in the direction of flow of the fluid to be measured relative to the heating resistor and a third temperature-sensitive resistor and a fourth temperature-sensitive resistor are disposed downstream in the direction of flow of the fluid to be measured relative to the heating resistor; and
the flow rate of the fluid to be measured is measured based on a change in resistance variable according to a difference in temperature of the first to fourth temperature-sensitive resistors.
14. The thermal flow meter according to claim 6 , wherein an electrically insulating film is formed on an upper surface of the heating resistor and the heating temperature sensor is formed on a front surface of the electrically insulating film.
15. The thermal flow meter according to claim 6 , further comprising:
a wiring portion for leading electrically from the heating temperature sensor to an outside of the cavity portion, wherein
the wiring portion has a wire width on the cavity portion wider than a wire width of the heating temperature sensor.
16. The thermal flow meter according to claim 6 , wherein
the heating resistor is formed into a pattern having a plurality of turnaround portions; and
the heating temperature sensor is disposed along the turnaround portions of the heating resistor.
17. The thermal flow meter according to claim 6 , wherein the subsidiary passage includes: a throttle portion disposed near the opening portion, the throttle portion having a gradually narrowing passage area; a linear portion disposed near a position at which the sensor element is disposed, the linear portion having a straight pathway; and a curved portion disposed between the throttle portion and the linear portion, the curved portion having a curved pathway.