Method for the Production of a Ceramic Green Sheet
In order to produce ceramic green sheets with embedded structures of a functional material, structures of a functional material are first created on a carrier. The same structures are then embedded in a slip layer of a ceramic base material. Nearly plane-parallel green sheets obtained in this manner can easily be further processed to produce ceramic multilayer components.
1 - 11 . (canceled)
12 . A method for producing ceramic green sheets, the method comprising:
forming a structure made of a functional material on a carrier; and
after forming the structure, applying a slip layer of a ceramic base material to the carrier over the structure such that the structure is embedded completely in the slip layer.
13 . The method according to claim 12 , further comprising planarizing the slip layer after applying the slip layer to the carrier.
14 . The method according to claim 13 , wherein planarizing the slip layer comprises removing material from the slip layer using a blade.
15 . The method according to claim 12 , wherein forming the structure comprises printing the structure onto the carrier with a desired pattern.
16 . The method according to claim 12 , wherein forming the structure comprises:
forming a layer of the functional material over the whole surface area of the carrier; and
patterning the layer to form the structure.
17 . The method according to claim 12 , wherein the structure comprises a conductive material or a mass that can be sintered to form a conductive material.
18 . The method according to claim 12 , wherein the structure comprises a ceramic material that differs from the ceramic base material of the slip layer.
19 . The method according to claim 12 , wherein applying the slip layer comprises covering the structure with the slip layer to such a height of the structure amounts to more than 10% of the overall thickness of the slip layer.
20 . The method according to claim 19 , wherein applying the slip layer comprises covering the structure with the slip layer so that the slip layer has a height of 50 μm or less.
21 . The method according to claim 12 , wherein applying the slip layer comprises covering the structure with the slip layer so that the slip layer has a height of 50 μm or less.
22 . The method according to claim 12 , wherein applying the slip layer comprises applying the slip layer in a sheet casting method.
23 . The method according to claim 12 , further comprising drying the slip layer to form a green sheet.
24 . The method according to claim 23 , further comprising detaching the green sheet from the carrier.
25 . The method according to claim 24 , further comprising stacking the green sheet together with other green sheets to form a sheet stack and laminating the sheet stack to form a multilayer structure.
26 . The method according to claim 25 , further comprising producing an LTCC or HTCC ceramic from the multilayer structure.
27 . The method according to claim 12 , further comprising removing the slip layer from the carrier.
28 . The method according to claim 27 , further comprising applying a release layer to the carrier before forming the structure.
29 . A method for producing a ceramic green sheet, the method comprising:
blanket depositing a functional material over a carrier;
patterning the functional material to form a structure over the carrier;
applying a slip layer of a ceramic base material to the carrier over the structure such that the structure is embedded completely in the slip layer;
planarizing the slip layer such that the slip layer with the embedded structure has a substantially constant thickness;
removing the slip layer from the carrier; and
drying the slip layer to form a green sheet.
30 . The method according to claim 29 , further comprising:
stacking the green sheet together with other green sheets to form a sheet stack; and
laminating the sheet stack to form a multilayer structure.