Copper substrate for deposition of graphene
View Patent ↗Technologies are presented for growing graphene by chemical vapor deposition (CVD) on a high purity copper surface. The surface may be prepared by deposition of a high purity copper layer on a lower purity copper substrate using deposition processes such as sputtering, evaporation, electroplating, or CVD. The deposition of the high purity copper layer may be followed by a thermal treatment to facilitate grain growth. Use of the high purity copper layer in combination with the lower purity copper substrate may provide thermal expansion matching, compatibility with copper etch removal, or reduction of contamination, producing fewer graphene defects compared to direct deposition on a lower purity substrate at substantially less expense than deposition approaches using a high purity copper foil substrate.
1. A method to manufacture graphene, comprising:
providing a copper substrate that includes a first copper layer in contact with a second copper layer, the first copper layer thermally annealed to the second copper layer at a thermal annealing temperature within one of a vacuum and one or more noble gases, the first copper layer characterized by a first copper percentage by weight and the second copper layer characterized by a second copper percentage by weight,
wherein the second copper percentage by weight is greater than the first copper percentage by weight; and
growing a graphene monolayer via chemical vapor deposition on the second copper layer, wherein a defect areal density of the graphene monolayer grown on the second copper layer includes about 1000 defects per square centimeter of the graphene monolayer.
2. The method of claim 1 , wherein:
the first copper layer is further characterized by a first oxygen percentage by weight;
the second copper layer is further characterized by a second oxygen percentage by weight; and
the second oxygen percentage by weight is about the same or less than the first oxygen percentage by weight.
3. The method of claim 1 , wherein in a dimension perpendicular to the graphene monolayer,
the first copper layer is characterized by a first average thickness;
the second copper layer is characterized by a second average thickness; and
the second average thickness is less than the first average thickness.
4. The method of claim 3 , wherein the first average thickness is at least about 3 micrometers and the second average thickness is one atomic monolayer of copper to about 25 micrometers.
5. The method of claim 1 , wherein providing the copper substrate includes:
providing the first copper layer;
cleaning a surface of the first copper layer;
depositing the second copper layer on the cleaned surface of the first copper layer to form the copper substrate; and
thermally annealing the copper substrate.
6. The method of claim 5 , wherein the surface of the first copper layer is cleaned by one or more of sputter cleaning, acid etching, solvent rinsing, electropolishing, or chemical mechanical polishing.
7. The method of claim 5 , wherein the second copper layer is deposited on the surface of the first copper layer by one or more of sputtering, evaporation, electroplating, or chemical vapor deposition (CVD).
8. The method of claim 5 , wherein the second copper layer is saturated in dissolved oxygen at the annealing temperature.
9. The method of claim 5 , wherein the thermal annealing includes heating in an atmosphere comprising:
about 1 mole % hydrogen to about 10 mole % hydrogen; and
about 90 mole % to about 99 mole % of one or more noble eases.