Thin-film encapsulation, optoelectronic semiconductor body comprising a thin-film encapsulation and method for producing a thin-film encapsulation
View Patent ↗A thin-film encapsulation for an optoelectronic semiconductor body includes a PVD layer deposited by a PVD method, and a CVD layer deposited by a CVD method, wherein the CVD layer is applied directly on the PVD layer, and the CVD layer is etched back such that the CVD layer only fills weak points in the PVD layer.
1. A thin-film encapsulation, for an optoelectronic semiconductor or body comprising:
a PVD layer deposited by a PVD method, and
a CVD layer deposited by a CVD method,
wherein
the CVD layer is applied directly on the PVD layer, and
the CVD layer is etched back such that the CVD layer only fills weak points in the PVD layer,
wherein the PVD layer and CVD layer are a part of a thin-film encapsulation over a semiconductor body.
2. The thin-film encapsulation according to claim 1 , wherein the PVD layer is electrically conducting.
3. The thin-film encapsulation according to claim 1 , wherein the thickness of the PVD layer is 50 nm to 400 nm.
4. The thin-film encapsulation according to claim 1 , wherein the PVD layer is at least one selected from the group consisting of titanium, tungsten, titanium-tungsten, titanium nitride, tungsten nitride, titanium-tungsten nitride, platinum, nickel, gold and tantalum.
5. The thin-film encapsulation according to claim 1 , wherein the thickness of the CVD layer is 2 nm to 20 nm.
6. The thin-film encapsulation according to claim 1 , wherein the CVD layer is at least one selected from the group consisting of silicon, silicon oxide, silicon nitride and titanium nitride.
7. The thin-film encapsulation according to claim 1 , which comprises a plurality of CVD layers and PVD layers arranged alternately.
8. The thin-film encapsulation according to claim 1 , wherein a further PVD layer deposited by a PVD method is arranged on the etched-back CVD layer.
9. The thin-film encapsulation according to claim 1 , wherein the CVD layer comprises an electrically insulating material.
10. An optoelectronic semiconductor body comprising a thin-film encapsulation according to claim 1 , which encapsulates a metallic element of the semiconductor body.
11. The optoelectronic semiconductor body according to claim 10 , wherein the metallic element is an electrical contact or a reflective layer.
12. The optoelectronic semiconductor body according to claim 10 , wherein the metallic element is at least one selected from the group consisting of silver, aluminum, gold, titanium and nickel.
13. A method for producing a thin-film encapsulation comprising:
depositing a PVD layer by a PVD method, and
depositing a CVD layer by a CVD method,
wherein
the CVD layer is applied directly on the PVD layer, and
the CVD layer is etched back such that the CVD layer only fills weak points in the PVD layer,
wherein the PVD layer and CVD layer are a part of a thin-film encapsulation over a semiconductor body.
14. The method according to claim 13 , wherein a further PVD layer deposited by a PVD method is arranged on the etched-back CVD layer.
15. The method according to claim 13 , wherein the CVD layer comprises an electrically insulating material.
16. The method according claim 13 , wherein the PVD layer is at least one selected from the group consisting of titanium, tungsten, titanium-tungsten, titanium nitride, tungsten nitride, titanium-tungsten nitride, platinum, nickel, gold and tantalum.
17. The method according to claim 13 , wherein the CVD layer is at least one selected from the group consisting of silicon, silicon oxide, silicon nitride and titanium nitride.