Dry coating apparatus

1. A dry coating apparatus comprising:

a vacuum chamber through which an object to be coated passes using a sealing transfer roll and in which a vacuum is maintained;

a coating part provided in the vacuum chamber, the coating part configured to coat the object to be coated with a deposition vapor generated through heating and evaporation of a supplied coating material;

a coating material supply part connected to the coating part and passing through the vacuum chamber;

a heating source provided in an atmosphere to heat and evaporate the coating material in the coating part, wherein the heating source comprises an electro-magnetic coil generating the deposition vapor through levitation and heating the coating material using electro-magnetic force; and

an electro-magnetic coil separation unit including the coating part and connected to the vacuum chamber or a flange connected to the vacuum chamber to separate the coating part in the vacuum from the electro-magnetic coil in the atmosphere,

wherein the coating part comprises:

a deposition vapor generation part surrounded by the electro-magnetic coil by interposing the electro-magnetic coil separation unit between the deposition vapor generation part and the electro-magnetic coil, the deposition vapor generation part levitating and heating the coating material supplied therein using the electro-magnetic force; and

an evaporation vapor induction part and an evaporation vapor injection part which are connected to an upper portion of the deposition vapor generation part,

wherein the electro-magnetic separation unit further comprises an insulation flange in which the coating part is disposed, the insulation flange being connected to the vacuum chamber or the flange connected to the vacuum chamber using a sealing type coupling unit as a medium to maintain the vacuum; and

wherein the insulation flange comprises:

an insulation flange horizontal part connected to the vacuum chamber or the vacuum chamber-side flange in a sealed state using the sealing type coupling unit as a medium, wherein a connecting portion of the upper portion connecting the vapor generation part with the evaporation induction part is above the insulation flange horizontal part; and

an insulation flange hollow part disposed in a center of the insulation flange horizontal part and spaced apart by a predetermined distance from the deposition vapor generation part, the insulation flange hollow part being surrounded and wound by the electro-magnetic coil; and

wherein the coating material supply part is connected to the evaporation vapor induction part of the coating part and passing through the vacuum chamber to supply a solid or liquid coating material to the coating part.

2. The dry coating apparatus of claim 1 , wherein the insulation flange is formed of quartz, and the sealing type coupling unit is spaced farther from the electro-magnetic coil than a radius of a winding part of the electro-magnetic coil wound around the insulation flange.

3. The dry coating apparatus of claim 1 , wherein the sealing type coupling unit comprises a first assembly port to which the insulation flange horizontal part is attached, the first assembly port being assembled with the chamber in which the sealing type coupling unit is disposed or the vacuum chamber-side flange by disposing an elastomer therebetween,

wherein the first assembly port comprises a first cooling medium passage therein.

4. The dry coating apparatus of claim 3 , further comprising a second assembly port additionally disposed on an upper portion of the vacuum chamber or the vacuum chamber-side flange, the second assembly port comprising a second cooling medium passage therein,

wherein a cooling gas atmosphere is provided around the electro-magnetic coil of the heating source or cooling water is circulated into the electro-magnetic coil.

5. The dry coating apparatus of claim 1 , wherein one or more heating units are further disposed around the coating material supply part and the coating part.