Optoelectronic semiconductor chip and a method for the production thereof

1. An optoelectronic semiconductor chip comprising:

a semiconductor layer stack having an active layer for generating electromagnetic radiation; and

a mirror arranged on an underside of the semiconductor layer stack, wherein the mirror has a first region containing Ag and a second region containing Au; and

a diffusion barrier is arranged between the first region and the second region in direct contact with the first and second regions, wherein the diffusion barrier prevents diffusion of minor material between the first region and the second region and wherein the diffusion barrier has apertures.

2. The semiconductor chip according to claim 1 , wherein the first region and the second region are arranged vertically one on top of the other and are in direct contact with one another at least in places, vertically meaning in a direction perpendicular to the underside.

3. The semiconductor chip according to claim 1 , wherein the first region and the second region have different layer thicknesses.

4. The semiconductor chip according to claim 3 , wherein the layer thicknesses of the first region and the second region are matched to one another in such a way that it is possible to adjust a diffusion behavior of Ag out of the first region into the second region during operation of the semiconductor chip.

5. The semiconductor chip according to claim 1 , wherein the diffusion barrier reduces a diffusion behavior of mirror material between the first region and the second region, the diffusion barrier extending continuously between the regions.

6. The semiconductor chip according to claim 1 , wherein the size and distribution of the apertures are such that the diffusion behavior of the diffusion barrier is adjustable.

7. The semiconductor chip according to claim 1 , wherein the semiconductor chip is a thin-film LED.

8. A method of producing an optoelectronic semiconductor chip having a semiconductor layer stack and a mirror, the method comprising:

applying the mirror to a carrier, the minor having a first region comprising Ag and a second region comprising Au; and

applying the semiconductor layer stack to the second region of the mirror;

wherein a diffusion barrier is arranged between the first region and the second region in direct contact with the first and second regions, wherein the diffusion barrier prevents diffusion of minor material between the first region and the second region and wherein the diffusion barrier has apertures.

9. The method according to claim 8 , wherein the reflectivity of the minor changes over the lifetime of the semiconductor chip in such a way that the output of the semiconductor chip changes by less than 2% over its lifetime.

10. The method according to claim 8 , wherein the reflectivity of the minor changes, especially increases, over the lifetime of the semiconductor chip as a result of diffusion of Ag out of the first region into the second region.

11. The method according to claim 8 , wherein the layer thicknesses of the first region and the second region are made such that the diffusion behavior of Ag during operation of the semiconductor chip is adjusted.

12. The method according to claim 8 , wherein

prior to formation of the mirror the curve of the ageing of the semiconductor chip is determined, and

the first region and the second region of the mirror are formed in such a way that the ageing behavior is balanced out by increasing the reflectivity of the minor over the lifetime of the semiconductor chip.

13. The method according to claim 8 , wherein a diffusion barrier is arranged between the first region and the second region, the diffusion barrier having apertures, the size and distribution of the diffusion behavior during operation of the semiconductor chip being adjusted by the apertures.

14. The semiconductor chip according to claim 2 ,

wherein the second region is arranged nearer to the semiconductor layer stack than the first region,

wherein silver from the first region diffuses into the gold of the second region during operation of the semiconductor chip and thus increases the reflectivity of the mirror over its lifetime,

wherein the first region has a thickness of at least 30 nm and of at most 100 nm,

wherein the second region has a thickness of at least 50 nm and of at most 200 nm.

15. The semiconductor chip according to claim 4 ,

wherein the second region is arranged nearer to the semiconductor layer stack than the first region,

wherein silver from the first region diffuses into the gold of the second region during operation of the semiconductor chip and thus increases the reflectivity of the mirror over its lifetime,

wherein the first region has a thickness of at least 30 nm and of at most 100 nm,

wherein the second region has a thickness of at least 50 nm and of at most 200 nm.

16. An optoelectronic semiconductor chip comprising:

a semiconductor layer stack; and

a mirror;

wherein the semiconductor layer stack has an active layer for generating electromagnetic radiation;

wherein the mirror is arranged on an underside of the semiconductor layer stack;

wherein the mirror has a first region and a second region;

wherein the first region contains Ag;

wherein the second region contains Au;

wherein a diffusion barrier is arranged between the first region and the second region, the diffusion barrier being in direct contact with the first and second regions;

wherein the diffusion barrier prevents diffusion of minor material between the first region and the second region; and

wherein the diffusion barrier has apertures.

17. The semiconductor chip according to claim 16 ,

wherein the apertures in the diffusion barrier are openings in the layer of the diffusion barrier so that, in some regions, direct contact is made between the material of the first and second regions in the region of the openings in the diffusion barrier, and

wherein the openings in the diffusion barrier have a diameter of at least 10 nm and at most 50μm.

18. The semiconductor chip according to claim 16 ,

wherein the diffusion barrier covers a proportion of the area of the mirror, seen in plan view, of at least 70%, the rest of the area is covered by the apertures, and

wherein the diffusion barrier is formed with one or more of the following materials: TiWN, ZnO, silicon nitride, silicon oxide, Pt.