Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
View Patent ↗A piezoelectric element includes, as a piezoelectric layer, a thin film of potassium sodium niobate that is a perovskite compound represented by a general expression ABO 3 , in which Sr (strontium) is substituted on both of an A site and a B site and Mn (manganese) is substituted only on the A site. Accordingly, the piezoelectric element is provided to decrease a leak current of the piezoelectric element using the thin film of potassium sodium niobate, to increase a withstand voltage thereof and to improve piezoelectric characteristics thereof.
1. A piezoelectric element which includes, as a piezoelectric layer, a thin film of potassium sodium niobate that is a perovskite compound represented by a general expression ABO 3 ,
wherein the piezoelectric layer contains Sr (strontium) and Mn (manganese) as additives,
wherein Sr is substituted on both of an A site and a B site and
wherein Mn is substituted only on the A site.
2. The piezoelectric element according to claim 1 ,
wherein a B site distribution ratio of Sr is 5% or more and 50% or less in the piezoelectric layer.
3. The piezoelectric element according to claim 1 ,
wherein the piezoelectric layer contains at least one or more components selected from Li (lithium), Ba (barium), Ta (tantalum) and Zr (zirconium).
4. A piezoelectric actuator using the piezoelectric element according to claim 1 .
5. A piezoelectric sensor using the piezoelectric element according to claim 1 .
6. A hard disk drive comprising the piezoelectric actuator according to claim 4 .
7. An ink jet printer apparatus comprising the piezoelectric actuator according to claim 4 .