Semiconductor device and method of manufacturing the same
View Patent ↗Disclosed is a semiconductor device having a substrate including first and second regions. First interlayer insulation layers and conductive patterns alternately are stacked on a first region of the substrate. A second interlayer insulation layer covers the first interlayer insulation layers and the conductive patterns. A resistor is formed in the second interlayer insulation layer in the second region of the substrate.
1. A semiconductor device, comprising:
a substrate including first and second regions;
first interlayer insulation layers and conductive patterns alternately stacked in the first region of the substrate;
a through hole passing through the first interlayer insulation layers and the conductive patterns;
a channel layer formed in the through hole;
a second interlayer insulation layer covering the first interlayer insulation layers and the conductive patterns; and
a resistor formed in the second interlayer insulation layer in the second region of the substrate.
2. The semiconductor device of claim 1 , further comprising:
an insulation layer formed in a central portion of the channel layer, wherein a height of the insulation layer is less than a height of the channel layer; and
a conductive plug formed in the central portion of the channel layer and over the insulation layer,
wherein the channel layer is formed along a surface of the through hole,
wherein the channel layer has a tubular shape,
wherein the central portion of the channel layer is filled with the insulation layer and the conductive plug.
3. The semiconductor device of claim 2 , wherein the conductive plug is formed of the same material as that of the resistor.
4. The semiconductor device of claim 2 , wherein the conductive plug and the resistor have a same height.
5. The semiconductor device of claim 1 , wherein edges of the conductive patterns and edges of the first interlayer insulation layers extend from the first region to the second region so that a stepwise structure is formed on the second region of the substrate.
6. The semiconductor device of claim 5 , further comprising:
a driving gate formed in the second region of the substrate, wherein the driving gate is covered by the second interlayer insulation layer, and is disposed adjacent to the stepwise structure,
wherein the resistor includes a first resistor overlapping the driving gate.
7. The semiconductor device of claim 5 , wherein the resistor includes a second resistor disposed in the second interlayer insulation layer covering the stepwise structure.
8. The semiconductor device of claim 1 , wherein the resistor is formed of a polysilicon.
9. A semiconductor device, comprising:
a substrate including first and second regions;
first interlayer insulation layers and conductive patterns alternately stacked in the first region of the substrate;
a through hole passing through the first interlayer insulation layers and the conductive patterns;
a channel layer formed in the through hole;
a second interlayer insulation layer covering the first interlayer insulation layers and the conductive patterns; and
a resistor formed in the second interlayer insulation layer in the second region of the substrate,
wherein edges of the conductive patterns and edges of the first interlayer insulation layers extend from the first region to the second region so that a stepwise structure is formed in the second region of the substrate.