Semiconductor device
View Patent ↗A semiconductor device comprising: a first, a second and a third conductive layer; the second conductive layer being located between the first and third conductive layers; wherein respective regions of the first and second conductive layers form a first capacitor; and respective regions of the second and third conductive layers form a second capacitor.
1. A capacitor device comprising:
a first, a second and a third layer, each layer comprising a first discrete portion of conductive material located in a first region and a second discrete portion of conductive material located in a second region;
wherein in the first region, the discrete portions of the second and third layers are in electrical communication with each other, and the discrete portions of the first and second layers are electrically isolated from each other, the discrete portions of the first and second layers forming a first capacitor; and
wherein in the second region, the discrete portions of the first and second layers are in electrical communication with each other, and the discrete portions of the second and third layers are electrically isolated from each other, the discrete portions of the second and third layers forming a second capacitor.
2. The capacitor device of claim 1 , further comprising dielectric material between the first layer and the second layer and between the second layer and the third layer.
3. The capacitor device of claim 2 , wherein a thickness of the dielectric material between the second layer and the third layer is greater than the thickness of the dielectric material between the first layer and the second layer.
4. The capacitor device of claim 3 , wherein the thickness of the dielectric material between the second layer and the third layer is at least 1.5 times the thickness of the dielectric material between the first layer and the second layer.
5. The capacitor device of claim 1 , wherein the first and second capacitors have different breakdown voltages.
6. The capacitor device of claim 1 , wherein the first, second and third layers are patterned.
7. The capacitor device of claim 1 , wherein, in the region of the first capacitor, the second and third conductive layers are electrically connected by conductive material in at least one via.
8. The capacitor device of claim 1 , wherein, in the region of the second capacitor, an electrical connection is formed between the first and second conductive layers comprising conductive material in at least one via.
9. The capacitor device of claim 8 , wherein the electrical connection further comprises a discrete portion of the third layer separate from that region of the third layer which forms a plate of the second capacitor.
10. The capacitor device of claim 1 , wherein the first and second capacitors are formed on a common substrate.
11. The capacitor device of claim 1 , wherein the first and second capacitors are MiM (Metal Insulator Metal) capacitors.
12. The capacitor device as claimed in claim 1 , wherein the first region forming the first capacitor and second region forming the second capacitor are electrically isolated from each other within the capacitor device.
13. The capacitor device as claimed in claim 1 , wherein the first capacitor has two plates formed by the first discrete portion of the first layer and the first discrete portion of the second layer, and the second capacitor has two plates formed by the second discrete portion of the second layer and the second discrete portion of the third layer, and each of the plates of the first and second capacitors is electrically isolated from the other plates of the first and second capacitors within the capacitor device.
14. The capacitor device as claimed in claim 1 , wherein
the first discrete portion of the first layer in the first region is electrically isolated, within the capacitor device, from the second discrete portion of the first layer in the second region;
the first discrete portion of the second layer in the first region is electrically isolated, within the capacitor device, from the second discrete portion of the second layer in the second region; and
the first discrete portion of the third layer in the first region is electrically isolated, within the capacitor device, from the second discrete portion of the third layer in the second region.
15. A method of forming a capacitor device, the method comprising:
forming a first layer;
forming a second layer over the first layer; and
forming a third layer over the second layer, wherein:
each layer is located partly in a first region and partly in a second region, and each layer comprises a first discrete portion of conductive material located in the first region and a second discrete portion of conductive material located in the second region; and
providing in the first region, electrical communication between the discrete portions of the second and third layers, and electrical isolation between the discrete portions of the first and second layers, such that the discrete portions of the first and second layers form a first capacitor; and
providing in the second region, electrical communication between the discrete portions of the first and second layers, and electrical isolation between the discrete portions of the second and third layers, such that the discrete portions of the second and third layers form a second capacitor.
16. The method of claim 15 , wherein forming the at least two discrete portions of at least one of said first, second and third conductive layer comprises:
forming a continuous layer; and
patterning and etching the continuous layer so as to divide it into the at least two discrete portions.
17. The method as claimed in claim 15 , wherein the first region forming the first capacitor and second region forming the second capacitor are formed such as to be electrically isolated from each other within the capacitor device.
18. The method as claimed in claim 15 , wherein the first capacitor is formed with two plates formed by the first discrete portion of the first layer and the first discrete portion of the second layer, and the second capacitor has two plates formed by the second discrete portion of the second layer and the second discrete portion of the third layer, and each of the plates of the first and second capacitors is formed so as to be electrically isolated from the other plate of the first and second capacitors within the capacitor device.
19. A capacitor device comprising:
a first, a second and a third layer, each layer comprising conductive material;
the second layer being located between the first and third layers;
a first region comprising a first portion of each of the first, second and third layers;
a second region comprising a second portion of each of the first, second and third layers;
the first region being electrically isolated from the second region within the capacitor device;
wherein in the first region, the second and third layers are in electrical communication with each other, and the first and second layers are electrically isolated from each other, the first and second layers forming a first capacitor; and
wherein in the second region, the first and second layers are in electrical communication with each other, and the second and third layers are electrically isolated from each other, the second and third layers forming a second capacitor.
20. A capacitor device comprising:
a first, a second and a third layer, each layer comprising a first discrete portion of conductive material located in a first region and a second discrete portion of conductive material located in a second region;
wherein in the first region, the discrete portions of the first and second layers form the plates of a first capacitor; and
wherein in the second region, the discrete portions of the second and third layers form the plates of a second capacitor.