Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same
The present invention provides a resist pattern thickening material, which can utilize ArF excimer laser light; which, when applied over a resist pattern to be thickened, e.g., in form of lines and spaces pattern, can thicken the resist pattern to be thickened regardless of the size of the resist pattern to be thickened; and which is suited for forming a fine space pattern or the like, exceeding exposure limits. The present invention also provides a process for forming a resist pattern and a process for manufacturing a semiconductor device, wherein the resist pattern thickening material of the present invention is suitably utilized.
1. A method for forming a resist pattern, comprising:
forming a resist pattern on a surface of a workpiece to be processed, and
applying a resist pattern thickening material over the surface of the workpiece so as to cover the surface of the resist pattern,
wherein the resist pattern thickening material comprises a resin,
and a compound represented by the following General Formula (1), the resist pattern thickening material is nonaqueous and contains no acid generator and no crosslinker,
where “X” represents a functional group represented by the following Structural Formula (1); “Y” represents at least any one of a hydroxyl group, an amino group, an alkyl group-substituted amino group, an alkoxy group, an alkoxycarbonyl group, and an alkyl group, and the number of substituents in an amino group substituted by alkyl groups is an integer of 1 or 2; “m” is an integer of 1 or more; and “n” is an integer of 0 or more,
where “R 1 ” and “R 2 ” may be same to each other or different from each other and respectively represent a hydrogen atom or a substituent group; “Z” represents at least any one of a hydroxyl group, an amino group, an alkyl group-substituted amino group, and an alkoxy group, and the number of substituents in an amino group substituted by alkyl groups is an integer of 1 or 2,
wherein the resin is the polyparahydroxystyrene resin.
2. The method for forming a resist pattern according to claim 1 , wherein after the applying of the resist pattern thickening material over the surface of the workpiece so as to cover the surface of the resist pattern, the resist pattern thickening material is heated.
3. The method for forming a resist pattern according to claim 1 , wherein after the heating of the resist pattern thickening material, the resist pattern thickening material is rinsed.
4. The method for forming a resist pattern according to claim 3 , wherein the resist pattern thickening material is rinsed with at least any one of water and an alkali developer.
5. The method for forming a resist pattern according to claim 1 , wherein the resist pattern thickening material comprises an organic solvent which is a monohydric alcohol solvent having 4 or more carbon atoms, or a glycol solvent having 2 or more carbon atoms, or any combination of the monohydric alcohol solvent and the glycol solvent.
6. A method for manufacturing a semiconductor device comprising:
forming a resist pattern on a surface of a workpiece to be processed, and then applying a resist pattern thickening material over the surface of the workpiece so as to cover the surface of the resist pattern to thereby thicken the resist pattern, and
patterning the surface of the workpiece by etching the surface of the workpiece using the thickened resist pattern as a mask,
wherein the resist pattern thickening material comprises a resin,
and a compound represented by the following General Formula (1), the resist pattern thickening material is nonaqueous and contains no acid generator and no crosslinker,
where “X” represents a functional group represented by the following Structural Formula (1); “Y” represents at least any one of a hydroxyl group, an amino group, an alkyl group-substituted amino group, an alkoxy group, an alkoxycarbonyl group, and an alkyl group, and the number of substituents in an amino group substituted by alkyl groups is an integer of 1 or 2; “m” is an integer of 1 or more; and “n” is an integer of 0 or more,
where “R 1 ” and “R 2 ” may be same to each other or different from each other and respectively represent a hydrogen atom or a substituent group; “Z” represents at least any one of a hydroxyl group, an amino group, an alkyl group-substituted amino group, and an alkoxy group, and the number of substituents in an amino group substituted by alkyl groups is an integer of 1 or 2,
wherein the resin is the polyparahydroxystyrene resin.
7. The method for manufacturing a semiconductor device according to claim 6 , further comprising heating and rinsing the surface of the resist pattern thickening material after the applying of the resist pattern thickening material over the surface of the workpiece so as to cover the surface of the resist pattern.
8. The method for manufacturing a semiconductor device according to claim 6 , further comprising applying a surfactant over the surface of the resist pattern before the applying of the resist pattern thickening material.
9. The method for manufacturing a semiconductor device according to claim 8 , wherein the surfactant is at least one selected from polyoxyethylene-polyoxypropylene condensation compounds, polyoxyalkylene alkyl ether compounds, polyoxyethylene alkyl ether compounds, polyoxyethylene derivative compounds, sorbitan fatty acid ester compounds, glycerine fatty acid ester compounds, primary alcohol ethoxylate compounds, phenol ethoxylate compounds, nonylphenol ethoxylate compounds, octylphenol ethoxylate compounds, lauryl alcohol ethoxylate compounds, oleyl alcohol ethoxylate compounds, fatty acid ester surfactants, amide surfactants, natural alcohol surfactants, ethylene diamine surfactants, secondary alcohol ethoxylate compounds, alkyl cationic surfactants, amide-type quaternary cationic surfactants, ester-type quaternary cationic surfactants, amine oxide surfactants, betaine surfactants, and silicone surfactants.
10. The method for manufacturing a semiconductor device according to claim 6 , wherein the resist pattern is formed from at least any one of an ArF resist and a resist containing an acrylic resin.
11. The method for manufacturing a semiconductor device according to claim 6 , wherein the resist pattern thickening material comprises an organic solvent which is a monohydric alcohol solvent having 4 or more carbon atoms, or a glycol solvent having 2 or more carbon atoms, or any combination of the monohydric alcohol solvent and the glycol solvent.