Solar cell and method for manufacturing the same
View Patent ↗A method of manufacturing a solar cell includes: forming a dopant layer by doping a dopant to a semiconductor substrate; and forming an electrode electrically connected to the dopant layer. The forming of the electrode includes forming a metal layer on the dopant layer; and heat-treating the metal layer to form a first layer and a second layer. In the heat-treating of the metal layer, a portion of the metal layer adjacent to the semiconductor substrate forms the first layer including a compound formed by a reaction of the metal layer and the semiconductor substrate, and a remaining portion of the metal layer forms the second layer that covers the first layer.
1. A method of manufacturing a solar cell, comprising:
forming a dopant layer by doping a dopant to a semiconductor substrate including silicon; and
forming an electrode electrically connected to the dopant layer,
wherein the forming of the electrode comprises:
forming a barrier metal layer on the dopant layer;
heat-treating the barrier metal layer to form a first layer and a second layer; and
forming a conductive layer including a metal different from the barrier metal and is thicker than each of the first layer and the second layer,
wherein a portion of the barrier metal layer adjacent to the semiconductor substrate forms the first layer comprising a silicide compound formed by a reaction of the barrier metal layer and the semiconductor substrate during the heat-treating, and a remaining portion of the barrier metal layer forms the second layer that covers the first layer,
wherein the barrier metal comprises a metal selected from a group consisting of Ni, Pt, Ti, Co, W, Mo, Ta, and an alloy thereof, and
wherein the first layer is thicker than the second layer.
2. The method according to claim 1 , wherein the metal layer comprises Ni, and
wherein the first layer comprises NiSi and the second layer comprises Ni.
3. The method according to claim 1 , wherein a thickness ratio of the first layer:the second layer is in a range of about 1:0.1˜20.
4. The method according to claim 1 , wherein, in the forming of the metal layer, the metal layer has a thickness of about 0.2˜2 μm.
5. The method according to claim 1 , wherein the first layer has a thickness of about 0.2˜2.5 μm, and the second layer has a thickness of about 0.1˜1 μm.
6. The method according to claim 1 , wherein, in the heat-treating of the metal layer, a heat-treating temperature is in a range of about 250˜400° C.
7. The method according to claim 1 , wherein, in the heat-treating of the metal layer, a heat-treating temperature is in a range of about 250˜300° C.
8. The method according to claim 1 ,
wherein the conductive metal layer comprises one a material selected from a group consisting of copper (Cu), tin (Sn), silver (Ag), and an alloy thereof.
9. The method according to claim 1 , further comprising:
forming an insulation film on the dopant layer;
forming an opening at the insulation film; and
forming the electrode in the opening of the insulation film.
10. The method according to claim 9 , wherein the semiconductor substrate has a surface comprising at least one of protruded and depressed portions formed by texturing, and
wherein, in the forming of the opening, the at least one of protruded and depressed portions at a portion where the opening is formed is eliminated.
11. The method according to claim 1 , wherein, in the forming of the electrode, the electrode is formed by a method selected from a group comprising an electro plating method, an electro-less plating method, and a deposition method.
12. A solar cell, comprising:
a semiconductor substrate including silicon;
a dopant layer formed at the semiconductor substrate; and
an electrode electrically connected to the dopant layer,
wherein the electrode comprises a barrier layer in contact with the semiconductor substrate or the dopant layer and a conductive layer on the barrier layer,
wherein the barrier layer comprises a first layer and a second layer on the first layer,
wherein the second layer comprises a barrier metal, the first layer comprises a metal silicide compound formed by a heat-treatment reaction of the barrier metal and the semiconductor substrate, and the second layer covers the first layer,
wherein the barrier metal comprises a metal selected from a group consisting of Ni, Pt, Ti, Co, W, Mo, Ta, and an alloy thereof,
wherein the first layer is thicker than the second layer,
wherein the conductive layer includes a metal different from the barrier metal and is thicker than each of the first layer and the second layer.
13. The solar cell according to claim 12 , wherein the first layer has a thickness of 0.2˜2.5 μm, and the second layer has a thickness of 0.1˜10 μm.
14. The solar cell according to claim 12 , wherein the conductive layer comprises Cu.
15. The solar cell according to claim 12 , wherein the electrode further comprises a capping layer on the conductive layer and includes a metal different from the conductive layer, and
wherein the capping layer comprises a metal selected from a group consisting of Sn, Ag, and an alloy thereof.