Composition for anti-reflective coating and anti-reflective coating film using the same

1. An anti-reflective coating composition, comprising

a (meth)acrylate-based compound having a first molecular weight;

a (meth)acrylate-based compound having a second molecular weight higher than the first molecular weight;

inorganic nanoparticles; and

hollow particles.

2. The anti-reflective coating composition according to claim 1 , wherein the first molecular weight is less than 600, and the second molecular weight is 600 to 100,000.

3. The anti-reflective coating composition according to claim 1 , further comprising an initiator.

4. The anti-reflective coating composition according to claim 1 , further comprising a solvent.

5. The anti-reflective coating composition according to claim 1 , comprising

5 to 30 parts by weight of the (meth)acrylate-based compound having the second molecular weight;

5 to 30 parts by weight of the inorganic nanoparticles;

1 to 30 parts by weight of the hollow particles;

5 to 25 parts by weight of the initiator; and

100 to 500 parts by weight of the solvent, based on 100 parts by weight of the (meth)acrylate-based compound having the first molecular weight.

6. The anti-reflective coating composition according to claim 1 , wherein the (meth)acrylate-based compound having the first molecular weight is one or more compounds selected from the group consisting of pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, trimethylenepropane tri(meth)acrylate, ethylene glycol di(meth)acrylate, 9,9-bis[4-(2-acryloxyethoxy)phenyl]fluorene, bis(4-methacryloxythiophenyl)sulfide, and bis(4-vinylthiophenyl)sulfide.

7. The anti-reflective coating composition according to claim 1 , further comprising a fluorine-based (meth)acrylate compound substituted with one or more fluorine atoms.

8. The anti-reflective coating composition according to claim 7 , wherein the fluorine-based (meth)acrylate compound comprises one or more compounds selected from the group consisting of the compounds of the following Chemical Formulae 1 to 5:

wherein R 1 is a hydrogen group or an alkyl group having 1 to 6 carbon atoms, a is an integer of 0 to 7, and b is an integer of 1 to 3;

wherein c is an integer of 1 to 10;

wherein d is an integer of 1 to 11;

wherein e is an integer of 1 to 5;

wherein f is an integer of 4 to 10.

9. The anti-reflective coating composition according to claim 1 , wherein the (meth)acrylate-based compound having the second molecular weight comprises a compound having two or more molecules of the (meth)acrylate-based compound having the first molecular weight linked via a linker.

10. The anti-reflective coating composition according to claim 9 , wherein the (meth)acrylate-based compound having the second molecular weight comprises a compound having one or more substituents selected from the group consisting of an epoxy group, a hydroxyl group, a carboxyl group, a thiol group, an aromatic or aliphatic hydrocarbon group having 6 carbon atoms or more, and an isocyanate group.

11. The anti-reflective coating composition according to claim 9 , wherein the linker comprises a urethane bond, a thioether bond, an ether bond or an ester bond.

12. The anti-reflective coating composition according to claim 4 , wherein the solvent has a dielectric constant (25° C.) of 2030, and a dipole moment of 1.7˜2.8.

13. The anti-reflective coating composition according to claim 1 , wherein the inorganic nanoparticles have a number average diameter of 5 to 50 nm.

14. The anti-reflective coating composition according to claim 1 , wherein the inorganic nanoparticles are silica nanoparticles.

15. The anti-reflective coating composition according to claim 1 , wherein the hollow particles have a number average diameter of 5 to 80 nm.

16. The anti-reflective coating composition according to claim 1 , wherein the hollow particles are hollow silica particles.

17. An anti-reflective coating film, comprising

a first layer that comprises a crosslinked polymer of a (meth)acrylate-based compound having a first molecular weight and inorganic nanoparticles in the crosslinked polymer, and that has infiltrated into a substrate; and

a second layer that comprises a crosslinked copolymer of the (meth)acrylate-based compound having the first molecular weight and a (meth)acrylate-based compound having a second molecular weight higher than the first molecular weight and hollow particles in the crosslinked copolymer, and that covers the first layer.

18. The anti-reflective coating film according to claim 17 , wherein the first layer further comprises the region having the crosslinked copolymer of the (meth)acrylate-based compound having the first molecular weight and the (meth)acrylate-based compound having the second molecular weight, in addition to the region having the crosslinked polymer.

19. The anti-reflective coating film according to claim 17 , wherein the first molecular weight is less than 600, and the second molecular weight is 600 to 100,000.

20. The anti-reflective coating film according to claim 17 , wherein the second layer further comprises inorganic nanoparticles.

21. The anti-reflective coating film according to claim 18 , wherein the region having the crosslinked copolymer is located to a depth of approximately 5 to 50% of the first layer, based on the interface between the first and second layers.