Manufacturing method of magnet head able to reduce electrode film for plating
View Patent ↗Method for manufacturing a magnetic head includes providing a stopper layer on an upper surface of a main magnetic pole layer applying a magnetic flux to a recording medium via a first insulation layer, providing a second insulation layer on the upper surface of the first insulation layer to cover at least an entire surface of the stopper layer, covering an upper surface portion of the second insulation layer with a mask layer, forming a height difference portion by removing at least a first insulation layer portion not covered by the mask layer by etching to at least partially remove at least a stopper layer portion in a film thickness direction, and subsequently by removing the mask layer, forming a electrode film in the height difference portion, and forming a plating film, which is a magnetic shield for the main magnetic pole layer, on an upper surface of the electrode.
1. A method for manufacturing a magnetic head, comprising:
providing a stopper layer on an upper surface of a main magnetic pole layer that applies a magnetic flux to a recording medium, via a first insulation layer;
providing a second insulation layer on an upper surface of the first insulation layer so as to cover at least an entire surface of the stopper layer;
covering a portion of an upper surface of the second insulation layer with a mask layer; forming a height difference portion configured with a first surface, which is the upper surface of the second insulation layer protected by the mask layer, a second surface closer to the main magnetic pole layer than the first surface, an air bearing surface, and a side surface connecting the first surface and the second surface, by removing at least a portion of the second insulation layer that is not covered by the mask layer by etching so as to at least partially remove at least a portion of the stopper layer in a film thickness direction, and subsequently by removing the mask layer;
forming an electrode film on the first surface, the second surface and the side surface of the height difference portion; and
forming a plating film, which is a magnetic shield for the main magnetic pole layer, on an upper surface of the electrode, the plating film includes a first plating part and a second plating part, the first plating part and the second plating part are integrated with each other, and the first plating part is shorter than a direction perpendicular to the air bearing surface than the second plating part.
2. The method for manufacturing the magnetic head according to claim 1 , wherein
the plating film is formed up to a position above the electrode film formed on the first surface over the entire region of the electrode film.
3. The method for manufacturing the magnetic head according to claim 1 , wherein
the side surface is formed perpendicularly to the first and second surfaces.
4. The method for manufacturing the magnetic head according to claim 1 , wherein
the side surface is formed non-perpendicularly to the first and second surfaces.
5. The method for manufacturing the magnetic head according to claim 1 , wherein
the stopper layer is partially removed in the film thickness direction; and
the remaining stopper layer configures a portion of an insulation layer between the main magnetic pole layer and the magnetic shield.