Hidden hinge MEMS with temporary gimbal anchor
View Patent ↗Micro-electro-mechanical system (MEMS) mirror devices and manufacturing methods thereof. The device comprising a hinge layer having orthogonal tilt and roll hinges connecting inner and outer platforms such that the inner platform has bi-directional rotation. An electrode layer connected beneath the hinge layer controls rotation of the platforms. A mirror layer above the hinge layer comprises a mirror connected to the inner platform via a pedestal and fixed membrane connected to the hinge layer but detached from the mirror. An anchor temporarily reduces movement of the outer platform during fabrication. In a fabrication state, the anchor anchors the outer platform to the mirror layer's fixed membrane. In a post-fabrication state, a gap releases the outer platform.
1. A micro-electro-mechanical system (MEMS) device comprising:
a hinge layer including a fixed membrane having roll hinges connected to an outer platform having tilt hinges connected to an inner platform, the tilt hinges defining an axis of tilt rotation orthogonal to an axis of roll rotation defined by the roll hinges such that the inner platform is provided two degrees of rotational freedom;
an electrode layer, connected beneath the hinge layer, for receiving electrical control signals, the electrode layer comprising a roll electrode for electrically biasing roll rotation of the outer platform and the inner platform and a tilt electrode for electrically biasing tilt rotation of the inner platform;
a mirror layer, located above the hinge layer, comprising an outwardly extending mirror, connected to the inner platform via a pedestal, and a fixed membrane connected to the fixed membrane of the hinge layer but detached from the mirror; and
an anchor,
wherein a gap is defined between the anchor and the fixed membrane of the mirror layer such that the fixed membrane of the mirror layer is not connected to the outer platform.
2. The MEMS device of claim 1 , wherein the gap is defined in the fixed membrane of the mirror layer surrounding the anchor, thereby releasing the anchor and a cap of the fixed membrane of the mirror layer from the fixed membrane of the hinge layer.
3. The MEMS device of claim 2 , wherein dimensions of the gap surrounding the anchor define a hard stop limiting roll rotation of the outer platform.
4. The MEMS device of claim 2 , wherein the gap is shaped to have a small area of contact between the fixed membrane of the mirror layer, the anchor, and the cap.
5. The MEMS device of claim 1 , wherein the anchor comprises a portion of an underside of the mirror layer beneath the fixed membrane of the mirror layer.
6. The MEMS device of claim 1 , wherein the anchor connects at a distal end of the outer platform.
7. The MEMS device of claim 1 , wherein the outer platform surrounds the inner platform and tilt hinges.
8. The MEMS device of claim 1 , wherein the pedestal comprises a portion of an underside of the mirror layer beneath the mirror.
9. The MEMS device of claim 1 , wherein the anchor is a first anchor, the gap is a first gap, and the device further comprises:
a second anchor for further reducing movement of the outer platform,
wherein the first anchor and the second anchor connect the outer platform to the fixed membrane of the mirror layer proximate to opposite distal ends of the outer platform along the axis of roll rotation, and
wherein the first gap and a second gap are defined between the anchor and the fixed membrane of the mirror layer such that the fixed membrane of the mirror layer is not connected to the outer platform.
10. A micro-electro-mechanical system (MEMS) device comprising:
a hinge layer suspended between a mirror layer and an electrode layer,
the hinge layer comprising a hinge, defining an axis of rotation, and a platform connected to the hinge and rotatable about the axis via the hinge,
the mirror layer comprising a mirror and a fixed membrane, and
the electrode layer for receiving electrical signals to control rotation of the platform;
a pedestal connecting the mirror to the platform; and
an anchor,
wherein a gap is defined between the anchor and the fixed membrane such that the fixed membrane is not connected to release the platform.
11. The MEMS device of claim 10 , wherein the gap is defined in the fixed membrane surrounding the anchor, thereby releasing the anchor and a cap of the fixed membrane from a membrane of the hinge layer.
12. The MEMS device of claim 11 , wherein dimensions of the gap surrounding the anchor define a hard stop limiting roll rotation of the platform.
13. The MEMS device of claim 11 , wherein the gap is shaped to have a small area of contact between the fixed membrane, the anchor, and the cap.
14. The MEMS device of claim 10 , wherein the anchor comprises a portion of an underside of the mirror layer beneath the fixed membrane.
15. The MEMS device of claim 10 , wherein the anchor connects at a distal end of the platform.
16. The MEMS device of claim 10 , wherein the platform surrounds an inner platform and tilt hinges.
17. The MEMS device of claim 10 , wherein the pedestal comprises a portion of an underside of the mirror layer beneath the mirror.
18. The MEMS device of claim 10 , wherein the anchor is a first anchor, the gap is a first gap, and the device further comprises:
a second anchor.
19. The MEMS device of claim 18 , wherein the first anchor and the second anchor connect the platform to the fixed membrane proximate to opposite distal ends of the platform along an axis of roll rotation.
20. The MEMS device of claim 18 , wherein
the first gap and a second gap are defined between the anchor and the fixed membrane such that the fixed membrane is not connected to the platform.