Method and device for scanning light
A method of scanning a light beam is disclosed. The method comprises scanning the light beam along a first axis and scanning the light beam along a second axis, such that a functional dependence of the scanning along the first axis is substantially a step-wave, and a functional dependence of the scanning along the second axis is other than a step-wave.
1. A method for scanning a light beam, comprising:
directing the light beam to reflect from at least one micromirror in a microelectromechanical system (MEMS); and
driving the MEMS so as to cause the at least one micromirror to rotate resonantly about a first axis and to cause the at least one micromirror to rotate non-resonantly in a step-wave about a second axis.
2. The method of claim 1 , wherein the first axis is perpendicular to the second axis.
3. The method of claim 1 , wherein driving the MEMS causes the micromirror to scan the light beam in a raster pattern.
4. The method of claim 3 , wherein the raster pattern comprises a sequential scan.
5. The method of claim 3 , wherein the raster pattern comprises an interlaced scan.
6. The method of claim 1 , and comprising sensing a scanning position of the light beam and using the scanning position to synchronize the scanning of the light beam.
7. The method of claim 1 , wherein directing the light beam comprises controlling the light beam so that the scanned light beam projects an image on a surface.
8. The method of claim 1 , wherein directing the light beam comprises applying the scanned light beam in a light detection and ranging (LIDAR) system.
9. The method according to claim 1 , wherein driving the MEMS comprises actuating a magnetic circuit to drive the MEMS.
10. The method according to claim 9 , wherein a permanent magnetic material is mounted on the at least one micromirror for driving by the magnetic circuit.
11. A device for scanning a light beam, comprising:
a microelectromechanical system (MEMS), comprising at least one micromirror;
a light source, configured to direct the light beam to reflect from at least one micromirror; and
a drive, which is coupled to the MEMS so as to cause the at least one micromirror to rotate resonantly about a first axis and to cause the at least one micromirror to rotate non-resonantly in a step-wave about a second axis.
12. The device of claim 11 , wherein the first axis is perpendicular to the second axis.
13. The device of claim 11 , wherein the drive is configured to cause the micromirror to scan the light beam in a raster pattern.
14. The device of claim 13 , wherein the raster pattern comprises a sequential scan.
15. The device of claim 13 wherein the raster pattern comprises an interlaced scan.
16. The device of claim 11 , and comprising a sensor, which is configured to sense a scanning position of the light beam, wherein the scanning position is used to synchronize scanning of the light beam.
17. The device of claim 11 , wherein the light source is configured to control the light beam so that the scanned light beam projects an image on a surface.
18. The device of claim 11 , wherein the scanned light beam is applied in a light detection and ranging (LIDAR) system.
19. The device according to claim 11 , wherein the drive comprises a magnetic circuit for driving the MEMS.
20. The device according to claim 19 , and comprising a permanent magnetic material mounted on the at least one micromirror for driving by the magnetic circuit.