Gyro sensor and electronic apparatus
View Patent ↗A gyro sensor includes a first detection mass unit provided with a drive mass unit, a drive unit, a first detection unit and a first vibrating body; and a second detection mass unit provided with a second detection unit and a second vibrating body, the first vibrating body extends in the direction of the first axis and one end thereof is connected to the first detection mass unit, the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and the vibrating bodies vibrate in the direction of a third axis, along with the vibration in the direction of the first axis.
1. A gyro sensor that includes a structure, the structure comprising:
a drive mass unit;
a drive unit that drives the drive mass unit in a direction of a first axis;
a first detection mass unit that is provided with a first detection unit and a first vibrating body, and is connected to the drive mass unit, via a first elastic portion capable of being displaced in a direction of a second axis perpendicular to the first axis; and
a second detection mass unit that is provided with a second detection unit and a second vibrating body, and is connected to the drive mass unit, via a second elastic portion capable of being displaced in the direction of the second axis,
wherein the first vibrating body extends in the direction of the first axis, and one end thereof is connected to the first detection mass unit,
the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and
a free end of the first vibrating body and a free end of the second vibrating body vibrate in a direction of a third axis perpendicular to the first axis and the second axis, along with the vibration in the direction of the first axis.
2. The gyro sensor according to claim 1 ,
wherein two structures are placed in the direction of the first axis,
the two structures are connected to each other by a connecting elastic portion, and
the drive unit vibrates the drive mass units of the two structures at phases opposite to each other.
3. The gyro sensor according to claim 1 ,
wherein the first detection mass unit and the second detection mass unit are displaced in the directions opposite to each other by the angular velocity around the axis of the first axis, and are displaced in the same direction by the acceleration in the direction of the second axis or by the angular velocity around the axis of the third axis.
4. The gyro sensor according to claim 1 ,
wherein the drive mass unit is provided at a predetermined distance from a substrate, and
the drive mass unit includes
a first fixed substrate fixed to the substrate, and
a second fixed substrate fixed to the substrate.
5. The gyro sensor according to claim 1 , which
outputs a first detection signal that fluctuates based on the displacement of the first detection unit,
outputs a second detection signal that fluctuates based on the displacement of the second detection unit, and
detects the angular velocity around the axis of the first axis, based on the first detection signal and the second detection signal.
6. The gyro sensor according to claim 1 ,
wherein the structure has a third detection unit that detects the angular velocity around the axis of the second axis or the angular velocity around the axis of the third axis.
7. The gyro sensor according to claim 1 ,
wherein a frequency adjustment unit is provided in the first vibrating body or the second vibrating body.
8. An electronic apparatus comprising the gyro sensor according to claim 1 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.
9. An electronic apparatus comprising the gyro sensor according to claim 2 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.
10. An electronic apparatus comprising the gyro sensor according to claim 3 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.
11. An electronic apparatus comprising the gyro sensor according to claim 4 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.
12. An electronic apparatus comprising the gyro sensor according to claim 5 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.
13. An electronic apparatus comprising the gyro sensor according to claim 6 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.
14. An electronic apparatus comprising the gyro sensor according to claim 7 ;
wherein the electronic apparatus is a mobile personal computer, a mobile phone, or a digital camera.