Oxide semiconductor device including photodiode
View Patent ↗A solid-state image sensing element including a transistor with stable electrical characteristics (e.g., significantly low off-state current) is provided. Two different element layers (an element layer including an oxide semiconductor layer and an element layer including a photodiode) are stacked over a semiconductor substrate provided with a driver circuit such as an amplifier circuit, so that the area occupied by a photodiode is secured. A transistor including an oxide semiconductor layer in a channel formation region is used as a transistor electrically connected to the photodiode, which leads to lower power consumption of a semiconductor device.
1. A semiconductor device comprising:
a driver circuit comprising a first transistor comprising a first channel formation region, the first transistor being provided on a top surface of a semiconductor substrate;
a second transistor comprising an oxide semiconductor layer including indium in a second channel formation region over the first transistor; and
a photodiode over the second transistor, the photodiode being electrically connected to the second transistor,
wherein a gate electrode layer of the second transistor overlaps a gate electrode layer of the first transistor when seen from a direction perpendicular to the top surface of the semiconductor substrate.
2. The semiconductor device according to claim 1 ,
wherein the photodiode overlaps the second transistor.
3. The semiconductor device according to claim 2 ,
wherein the photodiode overlaps the first transistor.
4. The semiconductor device according to claim 1 ,
wherein the first channel formation region comprises crystalline silicon.
5. The semiconductor device according to claim 1 ,
wherein a semiconductor layer of the photodiode comprises crystalline silicon.
6. The semiconductor device according to claim 1 ,
wherein the photodiode comprises a p-type semiconductor region, an i-type semiconductor region, and an n-type semiconductor region.
7. A semiconductor device comprising:
a driver circuit comprising a first transistor comprising a first channel formation region, the first transistor being provided on a top surface of a semiconductor substrate;
a second transistor comprising an oxide semiconductor layer including indium in a second channel formation region over the first transistor;
a third transistor comprising an oxide semiconductor layer including indium in a third channel formation region over the semiconductor substrate; and
a photodiode over the second transistor and the third transistor, the photodiode being electrically connected to one of a source and a drain of the second transistor,
wherein the other of the source and the drain of the second transistor is electrically connected to the third transistor and to a gate electrode layer of the first transistor, and
wherein a gate electrode layer of the second transistor overlaps the gate electrode layer of the first transistor when seen from a direction perpendicular to the top surface of the semiconductor substrate.
8. The semiconductor device according to claim 7 ,
wherein the photodiode overlaps the second transistor or the third transistor.
9. The semiconductor device according to claim 7 ,
wherein the first channel formation region comprises crystalline silicon.
10. The semiconductor device according to claim 7 ,
wherein a semiconductor layer of the photodiode comprises crystalline silicon.
11. The semiconductor device according to claim 7 ,
wherein the photodiode comprises a p-type semiconductor region, an i-type semiconductor region, and an n-type semiconductor region.