High-frequency shear-horizontal surface acoustic wave sensor
View Patent ↗A Love wave sensor uses a single-phase unidirectional interdigital transducer (IDT) on a piezoelectric substrate for leaky surface acoustic wave generation. The IDT design minimizes propagation losses, bulk wave interferences, provides a highly linear phase response, and eliminates the need for impedance matching. As an example, a high frequency (˜300-400 MHz) surface acoustic wave (SAW) transducer enables efficient excitation of shear-horizontal waves on 36° Y-cut lithium tantalate (LTO) giving a highly linear phase response (2.8° P-P). The sensor has the ability to detect at the pg/mm 2 level and can perform multi-analyte detection in real-time. The sensor can be used for rapid autonomous detection of pathogenic microorganisms and bioagents by field deployable platforms.
1. A shear-horizontal surface acoustic wave sensor, comprising:
a piezoelectric substrate,
a unidirectional transmitting interdigital transducer on the substrate that primarily excites shear-horizontal waves on the substrate,
a guiding layer on the substrate that has a lower shear velocity than the substrate for confinement of the shear-horizontal wave therein as a guided Love wave,
a sensing region on the guiding layer, and
a unidirectional receiving interdigital transducer that detects the guided Love wave that is transmitted through the sensing region,
wherein the unidirectional transmitting and receiving transducers each comprise at least one cell, each cell comprising excitation and reflection electrode fingers, and wherein the finger spacings are optimized to excite or detect shear-horizontal waves that are in-phase along the length of each transducer in the presence of the guiding layer and the sensing region.
2. The sensor of claim 1 , wherein the transmitting interdigital transducer comprises a single-phase unidirectional transducer.
3. The sensor of claim 2 , wherein the single-phase unidirectional transducer comprises an electrode-width-controlled single-phase unidirectional transducer (SPUDT).
4. The sensor of claim 3 , wherein the electrode-width-controlled single-phase unidirectional transducer comprises at least one SPUDT cell, each SPUDT cell comprising a λ/8 excitation electrode finger and λ/8 and λ/4 reflection electrode fingers and wherein the finger spacings are tuned to generate acoustic waves predominantly in one direction.
5. The sensor of claim 4 , further comprising a grating reflector.
6. The sensor of claim 1 , wherein the transmitting and receiving interdigital transducers are configured in a delay-line configuration.
7. The sensor of claim 1 , wherein the frequency of the guided Love wave is greater than 100 MHz.
8. The sensor of claim 7 , wherein the frequency of the guided Love wave is greater than 300 MHz.
9. The sensor of claim 1 , wherein the piezoelectric substrate 36° YX lithium tantalate.
10. The sensor of claim 1 , wherein the piezoelectric substrate comprises 36° Y quartz, langasite, langatate, langanite, lead zirconate titanate, cadmium sulfide, berlinite, lithium iodate, lithium tetraborate, or bismuth germanium oxide.
11. The sensor of claim 1 , wherein the substrate comprises a piezoelectric crystal layer, that is approximately thicker than the Love wave penetration depth, on a non-piezoelectric substrate.
12. The sensor of claim 1 , wherein the guiding layer comprises a polymer, SiO 2 , or ZnO.
13. The sensor of claim 1 , wherein the guiding layer comprises a biologically sensitive interface for capturing analytes from a fluid on the guiding layer.
14. The sensor of claim 1 , wherein the guiding layer comprises a chemically sensitive interface for sorbing analytes from a fluid on the guiding layer.