IP Library Granted Patent US 9,991,676
Granted Patent B2
US 9,991,676 · App. 13/880,316 · Granted Jun 5, 2018

Small-mode-volume, vertical-cavity, surface-emitting laser

Inventors: David A. Fattal (Mountain View, CA); Marco Fiorentino (Mountain View, CA); Jingjing Li (Palo Alto, CA); Michael Renne Ty Tan (Menlo Park, CA); Wayne V. Sorin (Mountain View, CA)
Assignee: Hewlett Packard Enterprise Development LP
H01S5/18386H01S5/0424H01S5/18311H01S5/18316H01S5/18358H01S5/423
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Quick Facts
Patent No.
US 9,991,676
App. No.
13/880,316
Granted
Jun 5, 2018
Kind
B2
Abstract

A small-mode-volume, vertical-cavity, surface-emitting laser (VCSEL). The VCSEL includes an active structure to emit light upon injection of carriers, and two reflecting structures at least one of which is a grating reflector structure. The active structure is disposed within at least one of the reflecting structures. The reflecting structures are configured as a vertical-cavity resonator of small mode-volume. An optical-bus transmitter including a plurality of small-mode-volume VCSELs, and a system including at least one optical bus and at least one optical-bus transmitter in a digital-information processor, or a data-processing center, are also provided.

Claims (55)

1. A small-mode-volume, vertical-cavity, surface-emitting laser, said laser comprising:

two reflecting structures, at least one of which is a grating reflector structure; and

an active structure to emit light upon injection of carriers, said active structure disposed within a substantially intrinsic portion of said at least one of said reflecting structures,

wherein said reflecting structures are configured as a vertical-cavity resonator of small mode-volume.

2. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , further comprising:

a distributed Bragg reflector, said distributed Bragg reflector being another of said two reflecting structures and disposed below said grating reflector structure;

a first electrode coupled to a bottom portion of said distributed Bragg reflector; and

a second electrode coupled to a top portion of said distributed Bragg reflector,

wherein said active structure is disposed in said substantially intrinsic portion within said distributed Bragg reflector between said top portion and said bottom portion;

wherein a p-doped portion, said substantially intrinsic portion, and an n-doped portion are configured as a vertical p-i-n diode to provide carrier injection into said active structure; and

wherein said p-doped portion and said n-doped portion are selected from the group consisting of said top portion and said bottom portion, respectively, and said bottom portion and said top portion, respectively.

3. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 2 , further comprising:

an oxide aperture layer disposed between said active structure and said grating reflector structure to produce a gain-guided portion from where carriers may be injected into said active structure.

4. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 2 , wherein said distributed Bragg reflector is ion implanted to create a high electrical resistance portion, said high electrical resistance portion patterned to produce a gain-guided portion from where carriers may be injected into said active structure.

5. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , further comprising:

a portion disposed below said active structure, wherein said at least one grating reflector structure, which comprises said substantially intrinsic portion, further comprises:

an upper portion, wherein said active structure is disposed in said substantially intrinsic portion below said upper portion,

wherein a p-doped portion, said substantially intrinsic portion, and n-doped portion are configured as a vertical p-i-n diode to provide carrier injection into said active structure, and

wherein said p-doped portion and said n-doped portion are selected form the group consisting of said upper portion and said portion disposed below said active structure, respectively, and said portion disposed below said active structure and said upper portion, respectively.

6. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 5 , wherein said portion disposed below said active structure comprises:

a structure selected from the group consisting of a lower portion of said grating reflector structure and a space layer.

7. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , further comprising:

an upper portion comprising:

said substantially intrinsic portion of said grating reflector structure;

a p-doped portion disposed adjacent to a first side of a sub-wavelength grating of said grating reflector structure; and

an n-doped portion disposed adjacent to a second side of said grating of said grating reflector structure,

wherein said active structure is coupled with said p-doped portion and said n-doped portion, and

wherein said p-doped portion, said substantially intrinsic portion included in said upper portion, and said n-doped portion are configured as a lateral p-i-n diode to provide carrier injection into said active structure.

8. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , wherein thermal dissipation during operation is sufficiently reduced so that a band gap of said active structure does not appreciably change.

9. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , wherein power output during operation is on an order of about 1 milliwatt.

10. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , further comprising:

a spacer layer disposed below said grating reflector structure,

wherein a low refractivity portion of said spacer layer has a lower index of refraction than a distributed Bragg reflector.

11. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 10 , wherein said low refractivity portion is selected from the group consisting of a dielectric material having a low index of refraction and a cavity filled with a gas having a low index of refraction.

12. The small-mode-volume, vertical-cavity, surface-emitting laser of claim 1 , wherein said light has a wavelength from about 400 nanometers to about 1300 nanometers, and is modulated such that a modulation bandwidth is on an order of about 100 gigahertz.

13. An optical-bus transmitter, comprising:

a plurality of small-mode-volume, vertical-cavity, surface-emitting lasers, a laser of said plurality comprising:

two reflecting structures, at least one of which is a grating reflector structure; and

an active structure to emit light upon injection of carriers, said active structure disposed within a substantially intrinsic portion of said at least one of said reflecting structures,

wherein said reflecting structures are configured as a vertical cavity resonator of small mode-volume, and

wherein said small-mode-volume, vertical-cavity, surface-emitting laser of said plurality is configured as an optical output driver for a bit line of an optical bus.

14. A system comprising:

at least one optical bus; and

at least one optical-bus transmitter coupled with said optical bus, said optical-bus transmitter comprising:

a plurality of small-mode-volume, vertical-cavity, surface-remitting lasers, a laser of said plurality comprising:

two reflecting structures, at least one of which is a grating reflector structure: and

an active structure to emit light upon injection of carriers, said active structure disposed within a substantially intrinsic portion of said at least one of said reflecting structures,

wherein said reflecting structures are configured as a vertical cavity resonator of small mode-volume, and

wherein said small-mode-volume, vertical-cavity, surface-emitting laser of said plurality is configured as an optical output driver for bit-line of said optical bus.

15. The system of claim 14 , further comprising:

an integrated combination of components selected from the group consisting of a digital-information processor comprising:

a plurality of components integrated with said optical-bus; and

at least one optical-bus transmitter, wherein said optical-bus and at least one optical-bus transmitter are to transfer information between one component and another component coupled to said optical-bus in said digital-information processor,

and a data-processing center comprising:

plurality of digital-information processors wherein said optical-bus and at least one optical-bus transmitter are to transfer information between one digital-information processor and at least one other digital-information processor coupled to said optical-bus in said data-processing center.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 12, 2022
From: OT PATENT ESCROW, LLC
To: VALTRUS INNOVATIONS LIMITED
Reel/Frame 060005/0600 →
PATENT ASSIGNMENT, SECURITY INTEREST, AND LIEN AGREEMENT Recorded Jan 26, 2021
From: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP; HEWLETT PACKARD ENTERPRISE COMPANY
To: OT PATENT ESCROW, LLC
Reel/Frame 055269/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 9, 2015
From: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
To: HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP
Reel/Frame 037079/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 18, 2013
From: FATTAL, DAVID A.; FIORENTINO, MARCO; LI, JINGJING; TAN, MICHAEL RENNE TY; SORIN, WAYNE V.
To: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Reel/Frame 030247/0578 →
Continuity (1)
Related Publication 20130209110A1 · Aug 15, 2013