IP Library Granted Patent US 9,355,840
Granted Patent B2
US 9,355,840 · App. 13/884,258 · Granted May 31, 2016

High quality devices growth on pixelated patterned templates

Inventor: Wang Nang Wang (Bath, GB)
Assignee: NANOGAN LIMITED
H01L21/0243H01L21/0237H01L21/0242H01L21/0254H01L21/02381H01L21/02458H01L21/02488H01L21/02494H01L21/02587H01L29/04H01L33/007H01L33/22H01L2924/0002Y10T428/24802
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Quick Facts
Patent No.
US 9,355,840
App. No.
13/884,258
Granted
May 31, 2016
Kind
B2
Abstract

A method of producing a template material for growing semiconductor materials and/or devices, comprises the steps of: (a) providing a substrate with a dielectric layer on the substrate; and (b) forming a pixelated pattern on the dielectric layer, the pattern comprising a plurality of discrete groups of structures.

Claims (28)

1. A method of producing semiconductor materials and/or devices, comprising:

providing a template material comprising:

providing a substrate with a dielectric layer on the substrate; and

forming a pixelated pattern on the dielectric layer, the pattern comprising a plurality of discrete groups of structures;

wherein part of the substrate is removed to form a pixelated patterned substrate; and

growing semiconductor materials and/or devices onto the template.

2. A method according to claim 1 , comprising the step of:

removing the substrate from the grown semiconductor materials and/or devices.

3. A method according to claim 1 , wherein the pixelated pattern comprises a plurality of micrometer-scale structures.

4. A method according to claim 3 , wherein the structures are in a regular pattern.

5. A method according to claim 3 , wherein the structures are in an irregular pattern.

6. A method according to claim 1 , wherein the pixelated pattern comprises a plurality of nanometer-scale structures.

7. A method according to claim 1 , wherein the discrete groups are separated by micrometer-scale sized stripe boundaries.

8. A method according to claim 1 , wherein the structures comprise at least one of the set including columns, rods, holes, pyramids, hemispherical dots and trapezoids.

9. A method of producing a template material for growing semiconductor materials and/or devices, comprising the steps of:

(a) providing a substrate with a dielectric layer on the substrate; and

(b) forming a pixelated pattern on the dielectric layer, the pixelated pattern comprising a plurality of discrete groups of structures;

wherein the pixelated pattern comprises a plurality of combined micrometer-scale and nanometer-scale structures.

10. A method of producing semiconductor materials and/or devices, comprising the steps of providing a template material produced in accordance with claim 9 , and

(c) growing semiconductor materials and/or devices onto the template.

11. A method according to claim 10 , further comprising the step of:

(d) removing the substrate from the grown semiconductor materials and/or devices.

12. A template material comprising a substrate with a dielectric layer on the substrate; the dielectric layer including a plurality of structures formed thereon, wherein the plurality of structures are arranged in discrete groups, so that a pixelated pattern is formed on the dielectric layer;

wherein the pixelated pattern comprises a plurality of combined micrometer-scale and nanometer-scale structures.

13. A template material according to claim 12 , wherein the structures are in a regular pattern.

14. A template material according to claim 12 , wherein the structures are in an irregular pattern.

15. A template material according to claim 12 , wherein the discrete groups are separated by micrometer-scale sized stripe boundaries.

16. A template material according to claim 12 , wherein the structures comprise at least one of the set including columns, rods, holes, pyramids, hemispherical dots and trapezoids.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 23, 2024
From: QUANTUM NIL LIMITED; QUANTUM NIL LIMITED TAIWAN BRANCH
To: QUANTUM NIL CORPORATION; QUANTUM NIL TECHNOLOGY PTE. LTD.
Reel/Frame 068763/0564 →
NUNC PRO TUNC ASSIGNMENT Recorded Feb 13, 2023
From: NANOGAN LIMITED
To: QUANTUM NIL LIMITED; QUANTUM NIL LIMITED TAIWAN BRANCH
Reel/Frame 062668/0859 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 17, 2014
From: WANG, WANG NANG
To: NANOGAN LIMITED
Reel/Frame 033336/0834 →
Priority Claims (1)
GB 1018788.8 · Nov 8, 2010 · national
Continuity (1)
Related Publication 20140183700A1 · Jul 3, 2014