Semiconductor layer structure
This invention relates to a semiconductor layer structure. The semiconductor layer structure described includes a substrate and a buffer layer deposited onto the substrate. The semiconductor layer structure is characterized in that a drain voltage threshold lower than the breakdown voltage threshold is determined by isolating ions that are selectively implanted in just one region of the substrate into the substrate, wherein charge can dissipate from the one contact through the buffer layer towards a substrate region without isolating ions, if the one potential deviates from the other at least by the drain voltage threshold, and wherein the substrate region without isolating ions is located underneath the one contact. The semiconductor layer structure described allows dissipation of currents induced by induction in blocking active structures without damaging the active structures.
1. A semiconductor layer structure comprising a substrate, a buffer layer deposited onto the substrate, and an active semiconductor layer stack deposited onto the buffer layer, wherein the active semiconductor layer stack includes a layer formed as a channel by depositing a barrier layer, and contacts deposited onto the barrier layer, wherein the semiconductor layer structure is designed to permanently or temporarily prevent or limit, at least in a first direction, a lateral flow of current from one of the contacts to one of the other contacts through the layer if a potential of the one of the contacts deviates from another potential of the other of the contacts by less than a breakdown voltage threshold, wherein; a potential of the substrate corresponds to the other potential, and in that a drain voltage threshold lower than the breakdown voltage threshold is determined by isolating argon ions that are selectively implanted into the substrate such that the isolating argon ions are in just one region of the substrate said just one region of the substrate with isolating argon ions implanted being laterally adjacent to a substrate region without isolating argon, wherein charge can dissipate from the one contact through the buffer layer towards said substrate region without isolating argon ions, if the one potential deviates from the other at least by the drain voltage threshold, and wherein the substrate region without isolating argon ions is located underneath the one contact.
2. The semiconductor layer structure according to claim 1 , wherein in a cross section through the semiconductor structure, a first sectional area of the layer in the region between the one and the other contact is smaller than a second sectional area of a region between the one of the contacts and the substrate region without isolating ions.
3. The semiconductor layer structure according to claim 1 , wherein the drain voltage threshold is greater than a minimum voltage that may permanently exist between the one and the other contacts without the occurrence of a flow of current that damages the semiconductor structure.
4. The semiconductor layer structure according to claim 1 , wherein the implanted isolating ions include a formation of a p-n junction in at least one region on a surface of the substrate onto which the buffer layer is deposited.
5. The semiconductor layer structure according to claim 1 , wherein the active semiconductor structure forms a transistor and includes a gate contact deposited between the contacts on the barrier layer.
6. The semiconductor layer structure according to claim 1 , wherein the active semiconductor structure forms a diode with the one contact and the other contact.