Gyro sensor and electronic apparatus

1. A gyro sensor comprising:

a substrate; and

a first function element, a second function element and a third function element which are arranged above the substrate;

wherein the first function element includes

a first vibrating body which vibrates in a direction of a first axis, and

a first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis,

the second function element includes

a second vibrating body which vibrates in the direction of the second axis, and

a second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis,

the third function element includes

a third vibrating body which vibrates in the direction of the first axis or in the direction of the second axis, and

a third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and,

wherein the first, second, and third function elements are arranged linearly,

with respect to function elements next to each other of the first function element, the second function element and the third function element,

the direction of vibration of the vibrating body of one function element is different from the direction of displacement of the movable body of the other function element,

the direction of displacement of the movable body of the one function element is different from the direction of vibration of the vibrating body of the other function element, and

wherein a groove portion is provided on the substrate on the same side of the substrate as the one function element and the other function element and extends only partially through the substrate, and the groove portion is a rectangular groove provided between the one function element and the other function element and separates the one function element from the other function element, as viewed in a plan view, and extends parallel to a side of the one function element and the other function element in a width direction across the substrate.

2. The gyro sensor according to claim 1 , wherein the second function element is arranged on one side of the first function element, and the third function element is arranged on the other side of the first function element.

3. The gyro sensor according to claim 1 , wherein the first function element is arranged on one side of the second function element, and the third function element is provided on the other side of the second function element.

4. The gyro sensor according to claim 1 , wherein a first recessed portion, a second recessed portion, and a third recessed portion are provided on the substrate,

the first vibrating body and the first movable body are provided over the first recessed portion,

the second vibrating body and the second movable body are provided over the second recessed portion, and

the third vibrating body and the third movable body are provided over the third recessed portion.

5. The gyro sensor according to claim 1 , wherein the direction of the third axis is the same as a direction of thickness of the substrate.

6. The gyro sensor according to claim 1 , wherein a material of the substrate is glass, and

a material of the first vibrating body, the first movable body, the second vibrating body, the second movable body, the third vibrating body, and the third movable body is silicon.

7. The gyro sensor according to claim 1 , wherein the third vibrating body vibrates in the direction of the first axis, and

the first function element is provided between the second function element and the third function element.

8. The gyro sensor according to claim 1 , wherein the third vibrating body vibrates in the direction of the second axis, and

the second function element is provided between the first function element and the third function element.

9. The gyro sensor according to claim 1 , wherein the first function element, the second function element, and the third function element are arrayed substantially linearly on the substrate.

10. The gyro sensor according to claim 2 , wherein the first function element, the second function element, and the third function element are arrayed substantially linearly on the substrate.

11. The gyro sensor according to claim 3 , wherein the first function element, the second function element, and the third function element are arrayed substantially linearly on the substrate.

12. The gyro sensor according to claim 1 , wherein at least one function element of the first function element, the second function element, and the third function element vibrates in a tuning fork vibration pattern.

13. An electronic apparatus comprising the gyro sensor according to claim 1 .

14. An electronic apparatus comprising the gyro sensor according to claim 2 .

15. An electronic apparatus comprising the gyro sensor according to claim 3 .

16. An electronic apparatus comprising the gyro sensor according to claim 4 .

17. An electronic apparatus comprising the gyro sensor according to claim 7 .

18. An electronic apparatus comprising the gyro sensor according to claim 5 .

19. An electronic apparatus comprising the gyro sensor according to claim 6 .

20. An electronic apparatus comprising the gyro sensor according to claim 8 .

21. A gyro sensor comprising:

a substrate; and

a first function element, a second function element, and a third function element which are arranged above the substrate, the first function element being provided between the second function element and the third function element;

wherein the first function element includes

a first vibrating body which vibrates in a direction of a first axis, and

a first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis,

the second function element includes

a second vibrating body which vibrates in the direction of the second axis, and

a second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis,

the third function element includes

a third vibrating body which vibrates in the direction of the first axis, and

a third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and

wherein the first, second, and third function elements are arranged along the first axis,

a direction of vibration of the first vibrating body of the first function element is orthogonal to a direction of displacement of the second movable body of the second function element and is orthogonal to a direction of displacement of the third movable body of the third function element,

the direction of vibration of the vibrating body of one function element is different from the direction of displacement of the movable body of the other function element,

the direction of displacement of the movable body of the one function element is different from the direction of vibration of the vibrating body of the other function element, and

wherein a groove portion is provided on the substrate on the same side of the substrate as the one function element and the other function element and extends only partially through the substrate, and the groove portion is a rectangular groove provided between the one function element and the other function element and separates the one function element from the other function element, as viewed in a plan view, and extends parallel to a side of the one function element and the other function element in a width direction across the substrate.

22. A gyro sensor comprising:

a substrate;

a first function element, a second function element, and a third function element which are arranged above the substrate, the first function element being provided between the second function element and the third function element; and

a groove provided on the substrate on the same side of the substrate as the first function element, the second function element, and the third function element, the groove extending only partially through the substrate and separating the first function element from the second function element,

wherein the first function element includes

a first vibrating body which vibrates in a direction of a first axis, and

a first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis,

the second function element includes

a second vibrating body which vibrates in the direction of the second axis, and

a second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis,

the third function element includes

a third vibrating body which vibrates in the direction of the first axis, and

a third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and

wherein the first, second, and third function elements are arranged along the first axis, and

a direction of vibration of the first vibrating body of the first function element is orthogonal to a direction of displacement of the second movable body of the second function element and is orthogonal to a direction of displacement of the third movable body of the third function element.