Semiconductor device and fabrication method thereof
View Patent ↗A semiconductor device includes a gate electrode formed on a silicon substrate via a gate insulation film in correspondence to a channel region, source and drain regions of a p-type diffusion region formed in the silicon substrate at respective outer sides of sidewall insulation films of the gate electrode, and a pair of SiGe mixed crystal regions formed in the silicon substrate at respective outer sides of the sidewall insulation films in epitaxial relationship to the silicon substrate, the SiGe mixed crystal regions being defined by respective sidewall surfaces facing with each other, wherein, in each of the SiGe mixed crystal regions, the sidewall surface is defined by a plurality of facets forming respective, mutually different angles with respect to a principal surface of the silicon substrate.
1. A semiconductor device comprising:
a silicon substrate;
a gate insulating film over the silicon substrate;
a gate electrode formed over the gate insulating film;
a source region and a drain region formed in the silicon substrate;
a first SiGe mixed crystal region formed in the source region;
a second SiGe mixed crystal region formed in the drain region;
a first silicide layer over the first SiGe mixed crystal region;
a second silicide layer over the second SiGe mixed crystal region,
wherein a bottom of the first silicide layer and a bottom of the second silicide layer are located higher than a first boundary between the silicon substrate and the gate insulating film; and
a sidewall insulating film formed on side wall of
the gate electrode,
wherein a second boundary between the first SiGe mixed crystal region and the silicon substrate includes at least one facet, and a third boundary between the second SiGe mixed crystal region and the silicon substrate includes at least one facet,
wherein the second boundary includes two facets, and a cross-sectional shape of the second boundary includes a first convex portion, and
wherein the third boundary includes two facets, and a cross-sectional shape of the third boundary includes a second convex portion.
2. The semiconductor device according to claim 1 , wherein one of the two facets included in the second boundary is perpendicular to the first boundary; and
wherein one of the two facets included in the third boundary is perpendicular to the first boundary.
3. The semiconductor device according to claim 1 ,
wherein a peak of the first convex portion is located under the sidewall insulating film, and
wherein a peak of the second convex portion is located under the sidewall insulating film.
4. The semiconductor device according to claim 1 ,
wherein the two facets included in the second boundary are formed substantially of a (111) surface or a crystallographically equivalent surface thereof;
wherein the two facets included in the third boundary are formed substantially of a (111) surface or a crystallographically equivalent surface thereof, and
wherein a surface of the silicon substrate is formed of a (001) surface.