Semiconductor device and manufacturing method of semiconductor device
View Patent ↗A semiconductor device capable of reducing an inter-source electrode resistance RSS(on) and reducing a chip size is provided. A semiconductor device according to the present invention includes a chip partitioned into three areas including a first area, a second area, and a third area, and a common drain electrode provided on a back surface of the chip, in which the second area is formed between the first and third areas, a first MOSFET is formed in the first area and the third area, and a second MOSFET is formed in the second area.
1. A semiconductor device comprising:
a semiconductor substrate having a front surface and a back surface opposite to each other, the front surface having a rectangular shape comprising a first side, a second side opposite to the first side, a third side, and a fourth side opposite to the third side, in a plan view;
a first MOSFET having a first gate electrode, a first source region and a first drain region, provided over the front surface;
a second MOSFET having a second gate electrode, a second source region and a second drain region provided over the front surface;
a first source electrode coupled to the first source region, disposed over the front surface;
a second source electrode coupled to the second source region, disposed over the front surface;
a first gate line coupled to the first gate electrode, disposed over the front surface;
a second gate line coupled to the second gate electrode, disposed over the front surface;
a common drain electrode coupled to the first drain region and the second drain region, provided over the back surface,
wherein the first source electrode is disposed at the first, second, third and fourth sides of the front surface,
wherein the second source electrode is surrounded by the first source electrode at the first, second, third and fourth sides of the front surface in the plan view,
wherein the first source electrode overlaps the first MOSFET in the plan view, and
wherein the second source electrode overlaps the second MOSFET in the plan view.
2. The semiconductor device according to claim 1 , wherein a size of the first MOSFET is larger than a size of the second MOSFET.
3. The semiconductor device according to claim 1 , further comprising:
a first gate pad disposed in the first side, the first gate pad being electrically connected to the first MOSFET; and
a second gate pad disposed in the second side, the second gate pad being electrically connected to the second MOSFET.
4. The semiconductor device according to claim 3 , wherein there is no gate pad disposed on the second source electrode.
5. The semiconductor device according to claim 3 , wherein
each of the first and the second sides includes two source pads, and
each of the first and second gate pads is disposed so as to be sandwiched between the two source pads.
6. The semiconductor device according to claim 5 , wherein a source pad of the second MOSFET is formed over the second source electrode in a place sandwiched between the two source pads.
7. The semiconductor device according to claim 3 , wherein
each of the first and second sides includes two source pads,
in the first side, one of the source pads is disposed so as to be sandwiched between another of the source pads and the first gate pad,
in the second side, one of the source pads is disposed so as to be sandwiched between another of the source pads and the second gate pad, and
the first and second gate pads are disposed so as to be arranged in a row a short side of the chip.
8. A method of manufacturing a semiconductor device, comprising:
forming a semiconductor substrate having a front surface and a back surface opposite to each other, the front surface having a rectangular shape comprising a first side, a second side opposite to the first side, a third side, and a fourth side opposite to the third side, in a plan view;
forming a first MOSFET having a first gate electrode, a first source region and a first drain region, provided over the front surface;
forming a second MOSFET having a second gate electrode, a second source region and a second drain region provided over the front surface;
forming a first source electrode coupled to the first source region, disposed over the front surface;
forming a second source electrode coupled to the second source region, disposed over the front surface;
forming a first gate line coupled to the first gate electrode, disposed over the front surface;
forming a second gate line coupled to the second gate electrode, disposed over the front surface;
forming a common drain electrode coupled to the first drain region and the second drain region, provided over the back surface,
wherein the first source electrode is disposed at the first, second, third and fourth sides of the front surface,
wherein the second source electrode is surrounded by the first source electrode at the first, second, third and fourth sides of the front surface in the plan view,
wherein the first source electrode overlaps the first MOSFET in the plan view, and
wherein the second source electrode overlaps the second MOSFET in the plan view.
9. The method of manufacturing a semiconductor device according to claim 8 , wherein a size of the first MOSFET is made larger than a size of the second MOSFET.
10. The method of manufacturing a semiconductor device according to claim 8 , wherein
a first gate pad is disposed in the first side, the first gate pad being electrically connected to the first MOSFET; and
a second gate pad is disposed in the second side, the second gate pad being electrically connected to the second MOSFET.
11. The method of manufacturing a semiconductor device according to claim 10 , wherein there is no gate pad disposed on the second source electrode.
12. The method of manufacturing a semiconductor device according to claim 10 , wherein:
two source pads are formed in each of the first and second sides, and
each of the first and second gate pads is disposed so as to be sandwiched between the two source pads.
13. The method of manufacturing a semiconductor device according to claim 12 , wherein a source pad of the second MOSFET is formed over the second source electrode in a place sandwiched between the two source pads.
14. The method of manufacturing a semiconductor device according to claim 10 , wherein
two source pads are formed in each of the first and second sides,
in the first side, one of the source pads is disposed so as to be sandwiched between another of the source pads and the first gate pad,
in the second side, one of the source pads is disposed so as to be sandwiched between another of the source pads and the second gate pad, and
the first and second gate pads are disposed so as to be arranged in a row at a short side of the chip.
15. The semiconductor device according to claim 1 , wherein the first source electrode has a ring shape in the plan view.
16. The method of manufacturing a semiconductor device according to claim 8 , wherein the first source electrode has a ring shape in the plan view.