Bonding head
A bonding head 6 is provided with a tool base 8 in a housing 6 A and a laser for transmitting laser beam L is configured such that the laser beam L transmitted through this tool base 8 can heat an electronic component 3 and bond the same to a substrate 2 . A surface of a heat-radiating member 15 is provided in contact with a surface of the tool base 8 on which the laser beam L impinges. This heat-radiating member 15 has a light transmittance for transmitting the laser beam L and also has a thermal conductivity higher than the thermal conductivity of the tool base 8 . The tool base 8 is heated during bonding treatment, but heat transmitted to the tool base 8 rapidly escapes to the heat-radiating member 15 having a higher thermal conductivity.
1. A bonding head comprising a tool base disposed at a lower portion of a housing and, a laser for transmitting a laser beam to heat an electronic component and bond the electronic component to a substrate, a heat-radiating member provided in contact with a surface of the tool base on which the laser beam impinges and having a light transmittance for transmitting the laser beam and a thermal conductivity greater than a thermal conductivity of the tool base and a cooling member having a thermal conductivity greater than the thermal conductivity of the heat-radiating member is provided in contact with the heat-radiating member and arranged at a periphery of the heat-radiating member so that the laser beam passes through a center part of the heat-radiating member.
2. The bonding head according to claim 1 , wherein
a thickness of the heat radiating member is larger than a thickness of the tool base.
3. The bonding head according to claim 1 , wherein
a bonding tool is arranged between the tool base and the electronic component, and the bonding tool is in contact with the tool base and the electronic component, respectively, and the laser beam transmitted through the tool base heats the bonding tool and the heated bonding tool heats the electronic component.