IP Library Granted Patent US 9,328,011
Granted Patent B2
US 9,328,011 · App. 13/910,030 · Granted May 3, 2016

Laser-scribing of chemically strengthened glass

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Quick Facts
Patent No.
US 9,328,011
App. No.
13/910,030
Granted
May 3, 2016
Kind
B2
Abstract

A method is disclosed for scribing a contained crack or vent in a chemically strengthened glass sheet. The glass has shallow surface regions under compressive stress, bounding a central region under tensile stress. The vent is formed by rapidly bulk-heating the glass, using radiation from a carbon monoxide laser, to a depth just below a surface compressive region and extending marginally into the tensile stress region then rapidly cooling the heated region with a water mist spray. The glass sheet can be subsequently divided along the vent by application of mechanical or thermal stress.

Claims (27)

1. A method of scribing a sheet of chemically strengthened glass for subsequent separation into one or more parts, the chemically strengthened glass sheet characterized as having opposite surface zones under compressive stress, with a central zone between the surface zones being under tensile stress, the method comprising:

using a beam of laser-radiation from a carbon monoxide (CO) gas laser directed onto a surface to be scribed, and while translating the laser-radiation beam with respect to a surface of the chemically strengthened glass sheet, heating the glass sheet to a depth extending below the surface zone, and extending partially into the central zone; and

directing a coolant spray onto the surface at a predetermined distance behind the laser-radiation beam in the translation-direction thereof, thereby cooling the heated surface-zone and creating a contained crack following the translation-direction of the laser-radiation beam, the crack having a depth extending below the surface zone partially into the central zone;

and wherein the beam of laser radiation emitted from the laser has an about Gaussian intensity distribution and wherein the beam is transmitted through a sealed enclosure containing air having a predetermined controlled humidity selected to convert the Gaussian intensity distribution to a flat-top intensity distribution, wherein the beam having a flat-top intensity distribution is directed to the surface to be scribed.

2. The method of claim 1 , wherein laser-radiation beam is directed by a lens selected to provide a beam-spot of a predetermined shape on the surface to be scribed.

3. The method of claim 2 , wherein the translation-direction is in a straight line and the beam-spot has an elongated shape having a length aligned with the translation-direction.

4. The method of claim 2 , wherein the translation-direction is along an arcuate path and the beam-spot has a round shape.

5. The method of claim 4 , wherein the coolant spray is an annular spray surrounding the laser-radiation beam and leaving an air gap between the spray and the beam.

6. The method of claim 5 , wherein gas is forced between the annular coolant spray and the laser-radiation beam for preventing incursion of the coolant spray into the laser beam.

7. The method of claim 2 , wherein the lens focuses the beam on the surface.

8. The method of claim 2 , wherein the lens focuses the beam above the surface.

9. The method of claim 1 , wherein the beam path outside the controlled-humidity enclosure is purged with dry nitrogen.

10. The method of claim 1 , further including the steps forming a linear defect in the defect extending in a direction transverse to the translation-direction of the laser-radiation beam, and initiating the translation of the laser-radiation beam at a point behind the linear defect in the translation-direction for forming the contained surface crack.

11. The method of claim 10 , wherein the linear defect has a depth extending through the surface compressive-stress zone of the chemically strengthened glass sheet and partially into the central tensile-stress zone of the chemically strengthened glass sheet.

12. The method of claim 11 , wherein the contained crack formed by the translation of the heating the glass sheet and directing of coolant spray onto the surface has a depth about equal to the depth of the linear defect.

13. The method of claim 12 , wherein the linear defect is formed by the steps of, creating a contained region of surface laser damage using the directed laser-radiation beam, and propagating the linear defect from the controlled damage region by heating the surface-zone using the laser-radiation beam, then subsequently cooling the heated surface zone using the coolant spray, while translating the laser-radiation beam and the coolant spray in a direction transverse to the translation-direction used for forming the contained surface crack.

14. The method of claim 1 , wherein the laser-radiation beam has one or more wavelengths in a range between about 4 micrometers and about 6 micrometers.

15. A method of scribing a sheet of chemically strengthened glass for subsequent separation into one or more parts, the chemically strengthened glass sheet characterized as having opposite surface zones under compressive stress, with a central zone between the surface zones being under tensile stress, the method comprising:

creating a linear defect in a surface of the chemically strengthened glass sheet to be scribed, the linear extending in a first direction; then

using a beam of laser-radiation from a carbon monoxide (CO) gas laser directed onto the surface to be scribed, and while translating the laser-radiation beam with respect to the surface of the chemically strengthened glass sheet in a second direction transverse to the first direction along a path crossing the linear defect, heating the glass sheet to a depth extending below the surface zone, and extending partially into the central zone; and

directing a coolant spray onto the surface at a predetermined distance behind the laser-radiation beam in the translation-direction, thereby creating a contained crack following the translation-direction of the laser-radiation beam, the crack having a depth extending below the surface zone partially into the central zone and wherein the linear defect is formed by the steps of, initially creating a contained region of surface laser-damage using the directed laser-radiation beam, and propagating the linear defect from the controlled damage region by heating the surface-zone using the laser-radiation beam, then subsequently cooling the heated surface zone using the coolant spray, while translating the laser-radiation beam and the coolant spray in the first direction.

16. The method of claim 15 , wherein the laser-radiation beam has one or more wavelengths in a range between about 4 micrometers and about 6 micrometers.

17. The method of claim 15 , wherein laser-radiation beam is directed by a lens selected to provide a beam-spot of a predetermined shape on the surface to be scribed.

18. The method of claim 17 , wherein the translation-direction is in a straight line and the beam-spot has an elongated shape having a length aligned with the translation-direction.

19. The method of claim 17 , wherein the translation-direction is along an arcuate path and the beam-spot has a round shape.

20. The method of claim 15 , wherein the beam of laser-radiation directed onto the surface has a flat-top intensity distribution.

21. The method of claim 20 , wherein the beam of laser radiation from the laser has an about Gaussian intensity distribution and the flat-top intensity distribution of the laser-radiation beam on the surface is caused by propagating the Gaussian-intensity-distribution laser radiation beam through an enclosure of a predetermined length containing air having a predetermined controlled humidity.

Assignments (4)
SECURITY INTEREST Recorded Jul 1, 2022
From: II-VI INCORPORATED; II-VI DELAWARE, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; PHOTOP TECHNOLOGIES, INC.; COHERENT, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 060562/0254 →
PATENT RELEASE AND REASSIGNMENT - RELEASE OF REEL/FRAME 040575/0001 Recorded Jul 1, 2022
From: BARCLAYS BANK PLC, AS COLLATERAL AGENT
To: COHERENT, INC.
Reel/Frame 060562/0650 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Nov 7, 2016
From: COHERENT, INC.
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 040575/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 16, 2013
From: WASHKO, JOHN F., JR.; LI, XINGHUA; BOSENBERG, WALTER R.
To: COHERENT, INC.
Reel/Frame 031419/0424 →