Apparatus for thinning, testing and singulating a semiconductor wafer
View Patent ↗A wafer translator is provided with a patterned layer of wafer bonding thermoset plastic and is removably attached with a wafer so as to form a wafer/wafer translator pair. The wafer translator acts as a mechanical support during a thinning process as well as during a wafer dicing operation. The singulated integrated circuits are then removed from the wafer translator. In some embodiments, wafer level testing of the integrated circuits on the wafer is performed subsequent to the wafer thinning process but before the wafer and wafer translator are separated. In other embodiments, wafer level testing of the integrated circuits on the wafer is performed subsequent to the wafer dicing operation but before the diced wafer and wafer translator are separated.
1. An apparatus for wafer testing, comprising:
a wafer translator having a wafer-side facing a wafer and an inquiry-side facing away from the wafer, the wafer-side carrying contact structures corresponding to pads on dies of the wafer; and
a releasable adhesive material at the wafer-side of the wafer translator, wherein the adhesive material includes a plurality of openings positioned to expose a corresponding plurality of contact structures, wherein the releasable adhesive material is in a state that is optimized for (a) temporary holding of the wafer and (b) ability to attain another state characterized by ease of removal of the dies from the adhesive.
2. The apparatus of claim 1 , further comprising a wafer having an active side attached to the adhesive material.
3. The apparatus of claim 2 wherein at least one pad on the wafer is in contact with a contact structure on the wafer translator through an opening in the adhesive material.
4. The apparatus of claim 1 wherein the contact structures at the wafer-side of the wafer translator are a first plurality of the contact structures at a first scale that corresponds to a scale of the pads on the wafer, the wafer translator further comprising a second plurality of contact structures at the inquiry-side of the wafer at a second scale that corresponds to a scale of a probe card.
5. The apparatus of claim 2 wherein the wafer is thinned.
6. The apparatus of claim 2 wherein the wafer is singulated into individual dies.
7. The apparatus of claim 3 , further comprising a plurality of contact probes in contact with the inquiry-side of the wafer translator.
8. The apparatus of claim 1 wherein the openings in the adhesive material are formed by laser ablating or by etching.
9. The apparatus of claim 1 wherein the adhesive material has a CTE that is higher than a CTE of the wafer and the wafer translator.
10. The apparatus of claim 1 wherein the adhesive material is removable from the wafer by heating.
11. An apparatus for wafer testing, comprising:
a wafer translator having a wafer-side facing a wafer and an inquiry-side facing away from the wafer, the wafer-side carrying contact structures corresponding to pads on dies of the wafer; and
a releasable adhesive material at the wafer-side of the wafer translator, wherein the adhesive material includes a plurality of openings, wherein the releasable adhesive material is in a state that is optimized for (a) temporary holding of the wafer and (b) ability to attain another state characterized by ease of removal of the dies from the adhesive; and
a plurality of pads on the dies in contact with the wafer-side contacts through the openings in the adhesive material.
12. The apparatus of claim 11 wherein the wafer is releasable from the wafer translator by heating the adhesive material.
13. The apparatus of claim 11 wherein the wafer is singulated into individual dies.
14. The apparatus of claim 11 wherein the wafer is thinned.
15. The apparatus of claim 11 wherein the contact structures at the wafer-side of the wafer translator are a first plurality of the contact structures at a first scale that corresponds to a scale of the pads on the wafer, the wafer translator further comprising a second plurality of contact structures at the inquiry-side of the wafer at a second scale that corresponds to a scale of a probe card.
16. An apparatus for wafer testing, comprising:
a wafer translator having a wafer-side facing a wafer and an inquiry-side facing away from the wafer, the wafer-side carrying contact structures corresponding to pads on dies of the wafer; and
a releasable adhesive material at the wafer-side of the wafer translator, wherein the adhesive material includes a plurality of openings positioned to expose a corresponding plurality of contact structures, wherein the releasable adhesive material is configurable to (a) temporarily hold the wafer and (b) allow release of the dies from the adhesive.