Thin film transistor and display device
View Patent ↗A thin film transistor is provided that includes a gate electrode, a source electrode, and a drain electrode, an oxide semiconductor active layer formed over the gate electrode, a fixed charge storage layer formed over a portion of the oxide semiconductor active layer, and a fixed charge control electrode formed over the fixed charged storage layer.
1. A thin film transistor comprising:
a gate electrode, a source electrode, and a drain electrode;
an oxide semiconductor active layer formed over the gate electrode;
a fixed charge storage layer formed over a portion of the oxide semiconductor active layer; and
a fixed charge control electrode formed over the fixed charged storage layer.
2. The thin film transistor according to claim 1 , further comprising a buffer layer formed between the oxide semiconductor active layer and the fixed charge storage layer.
3. The thin film transistor according to claim 2 , wherein the buffer layer is made of an insulating material and is positioned between the fixed charge storage layer and a channel region of the oxide semiconductor active layer.
4. The thin film transistor according to claim 2 , wherein the buffer layer is made of silicon oxide, and the fixed charge storage layer includes at least one film selected from the group consisting of a silicon nitride film, an aluminum nitride film and an aluminum oxide film.
5. The thin film transistor according to claim 4 , further comprising an insulating interlayer on the source electrode and the drain electrode, the insulating interlayer having an opening opposing the upper surface of the fixed charge storage layer in such a manner that the fixed charge control electrode is disposed on an inner surface of the opening.
6. The thin film transistor according to claim 5 , wherein the buffer layer has a thickness in the range of 1 to 50 nm.
7. The thin film transistor according to claim 6 , wherein the fixed charge storage layer has a thickness of 100 nm or less.
8. The thin film transistor according to claim 2 , wherein the source electrode and the drain electrode are provided on portions of the oxide semiconductor active layer, and also contact both sides of the buffer layer and the fixed charge storage layer.
9. The thin film transistor according to claim 2 , wherein the buffer layer is formed of an insulating material and is configured to control a discharge of electrons stored in the fixed charge storage layer.
10. The thin film transistor according to claim 1 , further comprising a protective film formed on surfaces of a gate insulating layer, the source electrode, and the drain electrode,
wherein the protective film is formed between the fixed charge storage layer and the fixed charge control electrode, and
wherein the gate insulating layer is formed between the gate electrode and the oxide semiconductor active layer.
11. The thin film transistor according to claim 10 , further comprising an insulating interlayer surrounding portions of the gate insulating layer and the protective film.
12. The thin film transistor according to claim 11 , wherein the insulating interlayer has an insulating interlayer opening opposing an upper surface of the fixed charge storage layer.
13. The thin film transistor according to claim 12 , wherein the fixed charge control electrode is disposed at least on a bottom surface and side surfaces of the insulating interlayer opening.
14. The thin film transistor according to claim 1 , wherein the oxide semiconductor active layer includes a channel region, and the buffer layer and the fixed charge layer are formed of shapes at least substantially corresponding to a shape of the channel region.
15. The thin film transistor according to claim 14 , wherein a portion of the protective film overlying the channel region has a thickness smaller than other portions of the protective film.
16. The thin film transistor according to claim 1 , wherein the source electrode and the drain electrode are provided on portions of the oxide semiconductor active layer.
17. A display device comprising:
a substrate;
a thin film transistor formed on the substrate, the thin film transistor including a gate electrode, a gate insulating layer disposed on the surface of the gate electrode, an oxide semiconductor layer including a channel region on the gate insulating layer, a fixed charge storage layer having an upper surface, made of an insulating material over the channel region, a source electrode and a drain electrode that are each electrically connected to the oxide semiconductor layer, and a fixed charge control electrode disposed at the upper surface side of the fixed charge storage layer; and
a pixel formed on the substrate.
18. The display device according to claim 17 , wherein the pixel is an organic luminescent element including a lower electrode, an organic layer including a luminescent layer, and an upper electrode, in that order from the substrate side, and the fixed charge storage layer is made of the same material as the lower electrode or the upper electrode.