Optical module and method for fabricating optical module
View Patent ↗An optical module and a fabrication method thereof, the optical module includes a sub-substrate which includes a support layer, an active layer, a BOX layer interposed between the support layer and the active layer, and a height adjusting layer, an optical fiber, and an optical device which is fixed to a silicon substrate, wherein the sub-substrate includes a fixing groove formed by the active layer and the BOX layer, the optical fiber is fixed to the fixing groove, and the optical fiber is optically coupled to the optical device by positioning the sub-substrate via the height adjusting layer with respect to the silicon substrate.
1. An optical module comprising:
a silicon substrate;
a sub-substrate which includes a support layer, an active layer, a BOX layer interposed between said support layer and said active layer, and a height adjusting layer;
an optical fiber; and
an optical device which is fixed to said silicon substrate, wherein
said sub-substrate includes a fixing groove formed by said active layer and said BOX layer,
said optical fiber is fixed to said fixing groove, and
said optical fiber is optically coupled to said optical device by positioning said sub-substrate via said height adjusting layer with respect to said silicon substrate.
2. The optical module according to claim 1 , wherein said sub-substrate further includes a bonding Au layer formed on top of said height adjusting layer, and
said silicon substrate includes an Au micro-bump structure for bonding to said bonding Au layer.
3. A method for fabricating an optical module having a substrate and a sub-substrate and an optical device both bonded to said substrate, said method comprising the steps of:
processing a base member having a support layer, an active layer, and a BOX layer interposed between said support layer and said active layer, and removing a portion of said active layer by etching, thereby fabricating said sub-substrate having a fixing groove formed by said active layer and said BOX layer;
depositing, on top of said active layer, a height adjusting layer for adjusting the height of said active layer;
fixing an optical fiber to said fixing groove; and
positioning said sub-substrate via said height adjusting layer with respect to said silicon substrate, thereby optically coupling said optical fiber to said optical device.
4. The optical module fabrication method according to claim 3 , further comprising the steps of:
depositing a bonding Au layer on top of said height adjusting layer; and
forming an Au micro-bump structure on said silicon substrate for bonding to said bonding Au layer.