IP Library Granted Patent US 9,129,803
Granted Patent B2
US 9,129,803 · App. 13/920,814 · Granted Sep 8, 2015

Graphene deposition and graphenated substrates

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Quick Facts
Patent No.
US 9,129,803
App. No.
13/920,814
Granted
Sep 8, 2015
Kind
B2
Abstract

Methods, devices, systems and/or articles related to techniques for forming a graphene film on a substrate, and the resulting graphene layers and graphenated substrates are generally disclosed. Some example techniques may be embodied as methods or processes for forming graphene. Some other example techniques may be embodied as devices employed to manipulate, treat, or otherwise process substrates, graphite, graphene and/or graphenated substrates as described herein. Graphene layers and graphenated substrates produced by the various techniques and devices provided herein are also disclosed.

Claims (26)

1. A method to form a graphene film on a surface of a substrate, the method comprising:

depositing, by writing, graphite on the surface of the substrate to provide a graphite layer on the surface; and

polishing the graphite layer to provide the graphene film on the surface, the graphene film comprising a noncylindrical monolayer that is coplanar with the surface of the substrate.

2. A method according to claim 1 , further comprising annealing the graphite layer prior to polishing the graphite layer.

3. A method according to claim 2 , wherein annealing the graphite layer comprises adjusting an annealing temperature to a range between about 300° C. and about 900° C.

4. A method according to claim 2 , wherein annealing the graphite layer comprises adjusting an annealing temperature to a range between about 800° C. and about 900° C.

5. A method according to claim 2 , wherein annealing the graphite layer comprises adjusting an annealing temperature to a range between about 400° C. and about 500° C.

6. A method according to claim 2 , wherein annealing the graphite layer comprises providing an annealing atmosphere including oxygen.

7. A method according to claim 2 , wherein annealing the graphite layer comprises providing an annealing atmosphere including argon (Ar).

8. A method according to claim 2 , wherein annealing the graphite layer comprises providing an annealing atmosphere characterized by about 100 standard cubic centimeters per minute (sccm) of argon (Ar).

9. A method according to claim 1 , wherein depositing the graphite comprises depositing highly oriented pyrolytic graphite (HOPG) on the surface of the substrate.

10. A method according to claim 1 , wherein depositing the graphite comprises depositing the graphite on the surface of the substrate in a selected pattern to provide the graphite layer, which has the selected pattern on the surface.

11. A method according to claim 1 , wherein depositing the graphite comprises depositing the graphite in at least one contiguous graphene layer of 10,000 square micro-meters (μm 2 ) or larger.

12. A method according to claim 1 , wherein polishing the graphite layer comprises sonicating the graphite layer in an organic solution.

13. A method according to claim 1 , wherein polishing the graphite layer comprises sonicating the graphite layer in an organic solution comprising ethanol.

14. A method according to claim 1 , further comprising:

fixing the substrate on a 2D translational stage; and

translating the 2D translational stage to a position;

wherein depositing the graphite on the surface of the substrate includes contacting the graphite with the surface of the substrate at the position.

15. A method according to claim 14 , further comprising dynamically translating the 2D translational stage to additional positions according to a selected pattern such that the graphite layer is formed in the selected pattern on the surface of the substrate.

16. A method according to claim 1 , wherein the surface of the substrate comprises one or more of a solid surface and/or a perforated surface.

17. A method according to claim 1 , wherein the substrate comprises one or more of silicon (Si), anodized aluminum oxide (AAO), and/or copper (Cu).

18. A method according to claim 1 , further comprising oxidizing the surface of the substrate prior to depositing the graphite on the surface.

19. A method according to claim 1 , further comprising testing the graphene film using Raman spectroscopy.

20. A method according to claim 19 , wherein testing comprises evaluating Raman spectra intensity peaks corresponding to a plurality of layers of graphene film on the surface of the substrate.

21. A method according to claim 1 , further comprising arranging one or more electrodes on the substrate.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS, RECORDED ON JANUARY 29, 2019 AT REEL 048373 FRAME 0217 Recorded Sep 22, 2025
From: CRESTLINE DIRECT FINANCE, L.P., AS COLLATERAL AGENT
To: EMPIRE TECHNOLOGY DEVELOPMENT LLC
Reel/Frame 072936/0464 →
RELEASE OF SECURITY INTEREST Recorded Jul 31, 2019
From: CRESTLINE DIRECT FINANCE, L.P.
To: EMPIRE TECHNOLOGY DEVELOPMENT LLC
Reel/Frame 049924/0794 →
SECURITY INTEREST Recorded Jan 29, 2019
From: EMPIRE TECHNOLOGY DEVELOPMENT LLC
To: CRESTLINE DIRECT FINANCE, L.P.
Reel/Frame 048373/0217 →